CN109754890B - Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection - Google Patents
Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection Download PDFInfo
- Publication number
- CN109754890B CN109754890B CN201811605452.7A CN201811605452A CN109754890B CN 109754890 B CN109754890 B CN 109754890B CN 201811605452 A CN201811605452 A CN 201811605452A CN 109754890 B CN109754890 B CN 109754890B
- Authority
- CN
- China
- Prior art keywords
- nozzle
- metal
- droplet
- radioactive
- metal filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
- Radiation-Therapy Devices (AREA)
Abstract
本发明公开了一种利用电流体动力学微液滴喷射的放射性籽源金属源芯的制作方法,将喷口下方放置保持电学接地的金属细丝,在喷嘴与金属细丝之间施加一定电压。电流体动力学原理使得微小液滴产生,微滴上带有电荷,受到静电力作用,微滴倾向于被接地金属细丝收集。喷射过程中金属细丝可以沿轴向旋转,和沿轴向平移。保证微液滴均匀喷射在金属细丝的表面。该方法可用于放射性治疗领域。本发明结合电流体动力学微液滴产生技术和近距离放射性治疗装置制造技术。并能有效提高放射性物质与表面吸附反应的速度,另由于产生的微液滴带电,在电场力的作用下,微液滴更加倾向于沉积到金属细丝上,防止溶液的飞溅造成的不良后果。
The invention discloses a manufacturing method of a radioactive seed source metal source core sprayed by electrohydrodynamic micro-droplets. A metal filament kept electrically grounded is placed under the spout, and a certain voltage is applied between the nozzle and the metal filament. The principle of electrohydrodynamics allows the creation of tiny droplets, which are charged and subjected to electrostatic forces, which tend to be collected by grounded metal filaments. The metal filaments can rotate in the axial direction and translate in the axial direction during the spraying process. Ensure that the droplets are sprayed evenly on the surface of the metal filament. This method can be used in the field of radiotherapy. The present invention combines electrohydrodynamic droplet generation technology and brachytherapy device manufacturing technology. And can effectively improve the speed of the adsorption reaction between radioactive substances and the surface. In addition, because the generated droplets are charged, under the action of the electric field, the droplets are more inclined to deposit on the metal filaments, preventing the adverse consequences caused by the splash of the solution. .
Description
技术领域technical field
本发明涉及一种利用电流体动力学原理的微液滴产生装置产生微米直径液滴,液滴精准施加至导电细丝上的技术。属于微量液体施加技术领域。The invention relates to a technology for producing micron-diameter droplets by a micro-droplet generating device utilizing the principle of electrohydrodynamics, and the droplets are precisely applied to conductive filaments. It belongs to the technical field of micro liquid application.
背景技术Background technique
一般来讲,电流体动力学微液滴产生装置针对具有导电性的液体。由供液模块、导电喷嘴、导电基底构成,通过施加在导电喷嘴和导电基底之间的电压产生电场,以静电力的牵引作用下,导电喷嘴处的液体将形变,断裂形成液滴。在一定的供液流量下,通过调节所施加的电压,可以达到微液滴大小一致且微液滴产生频率稳定的喷射状态。所喷出的微液滴直径可达微米级。该技术在微量液体精准定量施加,生物医学工程,组织工程等领域有着广泛的应用前景。In general, electrohydrodynamic droplet generation devices are directed to liquids that have electrical conductivity. It is composed of a liquid supply module, a conductive nozzle and a conductive substrate. An electric field is generated by a voltage applied between the conductive nozzle and the conductive substrate. Under the traction of electrostatic force, the liquid at the conductive nozzle will be deformed and broken to form droplets. Under a certain liquid supply flow rate, by adjusting the applied voltage, a spraying state in which the size of the micro-droplets is uniform and the frequency of producing the micro-droplets is stable can be achieved. The diameter of the sprayed droplets can reach the micrometer level. This technology has broad application prospects in the fields of precise quantitative application of trace liquids, biomedical engineering, and tissue engineering.
通过放射性材料的间歇移植肿瘤和其他病状的局部处理是长期使用的公认的治疗方式。放射性的植入物用于提供放射性的治疗,以便破坏肿瘤,或减慢或阻止肿瘤的生长。放射性的植入物也用于阻止,肿瘤切除区域中排出的淋巴结中的转移性微小沉积物的增长。植入物也用于肿瘤切除后辐射术后瘤床。直接向实体肿瘤埋植辐射源以破坏肿瘤称为近距离放射性治疗疗法。Local treatment of tumors and other pathologies by intermittent implantation of radioactive material is an accepted treatment modality for long-term use. Radioactive implants are used to deliver radiation therapy to destroy tumors, or to slow or stop tumor growth. Radioactive implants are also used to stop the growth of metastatic microscopic deposits in lymph nodes draining from the tumor resection area. Implants are also used in post-radiation tumor beds after tumor resection. Implanting a radiation source directly into a solid tumor to destroy the tumor is called brachytherapy.
例如,授予Lawrence的美国专利权3351049公开使用低能量发射X射线的间质植入作为近距离放射性的治疗源。这种植入,特别是那些包含钯(Pd-103)或碘(I-125)作为放射性同位素的,业已证明对于实体恶性肿瘤是极有效的。在用这种装置治疗早期的前列腺癌时有很好的效果。这些装置,或称“种子”,必须很小,因为它们一般通过一个空心的针置于病变组织中。一旦植入组织中,由周围的组织保持在位,或通过一个相关的缝合线固定在位。一个永久的植入物的一般大小是一个0.8毫米直径长0.45毫米的圆柱。一个临时的植入物一般通过一个空心的针或塑料套插入要处理的组织中,并具有与永久植入体相同的约0.8毫米的外径For example, US Patent No. 3,351,049 to Lawrence discloses the use of low energy X-ray emitting interstitial implants as a therapeutic source of brachytherapy. Such implants, especially those containing palladium (Pd-103) or iodine (I-125) as radioisotopes, have proven to be extremely effective against solid malignancies. There is good effect in the treatment of early stage prostate cancer with this device. These devices, or "seeds," must be small because they are typically placed in diseased tissue through a hollow needle. Once implanted in tissue, it is held in place by surrounding tissue or held in place by an associated suture. The typical size of a permanent implant is a cylinder 0.8 mm in diameter and 0.45 mm long. A temporary implant is generally inserted through a hollow needle or plastic sheath into the tissue to be treated and has the same outer diameter of about 0.8 mm as a permanent implant
在发明专利《近距离放射治疗装置放射性材料的流体喷射沉积》中,公开了一种向近距离放射性治疗装置等底物精确施加放射性材料的方法和装置。能够快速固化的放射性流体用一个喷流喷头在一个表面上沉积成为所希望的点。然而,当被沉积表面为一根细丝表面时,该发明提及的方法在控制微液滴精准施加方面仍存在部分缺陷。喷嘴处亲水特性改变等诸多因素会导致微液滴偏离细丝。不仅浪费珍贵的放射性液体,更会影响放射性计量的准确性,并污染周围环境。In the invention patent "Fluid Jet Deposition of Radioactive Materials for Brachytherapy Devices", a method and device for precisely applying radioactive materials to substrates such as brachytherapy devices are disclosed. The rapidly solidifying radioactive fluid is deposited at the desired spot on a surface with a jet. However, when the deposited surface is a filament surface, the method mentioned in this invention still has some drawbacks in controlling the precise application of microdroplets. A number of factors, including changing hydrophilic properties at the nozzle, can cause droplets to deviate from the filament. It not only wastes precious radioactive liquid, but also affects the accuracy of radioactive measurement and pollutes the surrounding environment.
本发明克服了以上缺陷,采用电流体动力学技术喷射微液滴,不仅可以通过调整电压和流量可实现微液滴尺寸的控制,并且由于微液滴带有电荷,通过静电力对带电微液滴的引导作用可以将微液滴精准施加至导电细丝上,有效防止微液滴偏离导电细丝的情况发生。The present invention overcomes the above defects and adopts electrohydrodynamic technology to spray micro-droplets, which can not only control the size of micro-droplets by adjusting the voltage and flow rate, but also can control the size of micro-droplets by adjusting the voltage and flow rate. The guiding function of the droplet can precisely apply the droplet to the conductive filament, which can effectively prevent the droplet from deviating from the conductive filament.
发明内容SUMMARY OF THE INVENTION
针对现有技术存在的缺陷,本发明提供了一种基于电流体动力学微液滴喷射的放射性籽源源芯的制作方法。电流体动力学微液滴产生技术可以产生直径远小于喷嘴的微液滴。在适当的工作条件下,微液滴直径可以达到10微米以下,甚至亚微米。微液滴直径的缩小提高微液滴表面与微液滴体积的比例,从而有效提高放射性物质与表面吸附反应的速度。由于产生的微液滴带电,在电场力的作用下,微液滴更加倾向于沉积到导电细丝上,防止溶液的飞溅造成的不良后果。In view of the defects existing in the prior art, the present invention provides a method for making a radioactive seed source core based on the jetting of electrohydrodynamic micro-droplets. Electrohydrodynamic droplet generation technology can generate droplets with diameters much smaller than the nozzles. Under proper working conditions, the diameter of microdroplets can reach below 10 microns, even submicron. The reduction of the diameter of the microdroplet increases the ratio of the surface of the microdroplet to the volume of the microdroplet, thereby effectively increasing the speed of the adsorption reaction between the radioactive substance and the surface. Because the generated droplets are charged, under the action of the electric field force, the droplets are more inclined to deposit on the conductive filaments, preventing the adverse consequences caused by the splash of the solution.
本发明拟将导电喷嘴下方放置保持电学连接(通常接地)的导电细丝,在导电喷嘴与导电细丝之间施加一定电压。电流体动力学原理使得微小液滴产生,微液滴上带有电荷,受到静电力作用,微液滴倾向于被接地导电细丝收集。喷射过程中金属丝可以沿轴向旋转,并且可以沿轴向平移保证微液滴均匀喷射在导电细丝的表面。促进液体与细丝表面充分接触,从而加快放射性物质与表面的吸附或反应。同时,可以避免液体局部堆积对电场分布的影响,保持微液滴喷射的一致性和稳定性。特别涉及一种将微米级液滴精准施加至导电丝上的方法,该方法可用于放射性治疗领域。本发明结合了两种迄今为止无关的技术,即电流体动力学微液滴产生技术和近距离放射性治疗装置制造技术。The present invention intends to place a conductive filament that is electrically connected (usually grounded) under the conductive nozzle, and apply a certain voltage between the conductive nozzle and the conductive filament. The principle of electrohydrodynamics enables the generation of tiny droplets, which are charged with electrostatic forces and tend to be collected by grounded conductive filaments. During the spraying process, the metal wire can rotate in the axial direction, and can translate along the axial direction to ensure that the microdroplets are sprayed evenly on the surface of the conductive filament. Promote the full contact of the liquid with the surface of the filament, thereby accelerating the adsorption or reaction of the radioactive material with the surface. At the same time, the influence of the local accumulation of liquid on the distribution of the electric field can be avoided, and the consistency and stability of the ejection of micro-droplets can be maintained. In particular, it relates to a method for precisely applying micron-sized droplets onto conductive filaments, which can be used in the field of radiotherapy. The present invention combines two hitherto unrelated technologies, namely electrohydrodynamic droplet generation technology and brachytherapy device fabrication technology.
本发明采用的技术方案为一种利用电流体动力学微液滴喷射的放射性籽源金属源芯的制作方法,实现该制作方法的电流体动力学微液滴喷射装置包括供液模块2,微液滴产生系统,夹持装置6,CCD图像采集模块7,以及控制芯片3。The technical solution adopted in the present invention is a method for manufacturing a radioactive seed source metal source core using electro-hydrodynamic micro-droplet ejection. The electro-hydrodynamic micro-droplet ejection device for realizing the manufacturing method comprises a
微液滴产生系统包括电源1、导电喷嘴4和导电细丝5,电源1分别与导电喷嘴4、导电细丝5相连接,导电喷嘴4与导电细丝5的位置相对应;供液模块2与导电喷嘴4连接,供液模块2的供液量由控制芯片3控制。供液模块2中填充有放射性流体。The micro-droplet generation system includes a
导电细丝5安装在夹持装置6上;CCD图像采集系统7正对导电细丝轴向5。夹持装置能够实现导电细丝5的轴向平移和绕轴转动的运动。The
供液模块2是以推动针管活塞为工作原理的注射泵(如图2所示),或者是利用在细管两端保持压差实现的泊肃叶流体(如图3所示)。供液模块2的供液量通过活塞推进速度和活塞截面积计算;泊肃叶流体的供液量通过在细管两端维持一定压强,供液量的流量能够根据泊肃叶公式得到。The
电源1为可调稳压电源,或者脉冲电源。The
电源1的电压由导电喷嘴4与导电细丝5的距离确定。为提高导电喷嘴4的喷射稳定性和一致性,导电喷嘴4与导电细丝5的距离为1mm–10mm。电源1的电压为100V–10000V。The voltage of the
夹持装置6可以保证导电细丝可以沿轴向转动,以及沿轴向平移。同时保持导电细丝与电源电极(通常设为接地端)的电学接触。The
微液滴喷射的一致性和稳定性,以及微液滴是否准确到达导电细丝均可以在控制芯片3的控制下,通过CCD图像采集系统得到证实。具体的实现技术不在本发明的保护范围之内。The consistency and stability of the ejection of the micro-droplets and whether the micro-droplets reach the conductive filaments accurately can be confirmed by the CCD image acquisition system under the control of the
本方法的通常工作步骤如下:The usual working steps of this method are as follows:
将电源1的一极(正极)与导电喷嘴4相连接,电源1的另一极连接导电细丝5并接地,施加电压,导电喷嘴4中填充有放射性流体,由于放射性流体(通常为NaI)具有良好导电性,在放射性流体和导电细丝5之间产生电场,放射性流体的表面积聚电荷,电荷在电场中受力,使得放射性流体在电场力、表面张力、重力的联合作用下发生形变,尖端处的溶液变形:从半球形或椭圆形液体变为锥形液体。电场足够大时静电力和重力超过表面张力,锥形液体的尖端处断裂,形成微小液滴,微小液滴的直径小于喷嘴直径,微小液滴带有电荷,在导电喷嘴4与导电细丝5之间的电场作用下,微小液滴会被准确收集于导电细丝5上。One pole (positive pole) of the
放射性液体(通常为NaI)通过与经过表面处理的导电细丝5发生吸附反应,吸附反应结束后,绝大部分放射性物质与导电细丝5结合,而液相中几乎没有放射性物质成分,下文称为“残液”。The radioactive liquid (usually NaI) undergoes an adsorption reaction with the surface-treated
残液的除去能够在放射性与导电细丝5的吸附反应完成后实施。The removal of the residual liquid can be carried out after the adsorption reaction of the radioactivity and the
导电细丝5的截取分割在残液除去之后实施。The cutting and dividing of the
本发明与现有技术相比具有以下的有益效果:Compared with the prior art, the present invention has the following beneficial effects:
本发明解决了现有技术同位素溶液会外溅的缺陷,可以实现溶液准确收集在导电细丝5上,减少浪费和放射性污染。提高源芯放射性计量的精度。The present invention solves the defect that the isotope solution will splash out in the prior art, can realize the accurate collection of the solution on the
本发明可通过调节电压控制液滴尺寸的大小,对于直径小的导电细丝5而言,可防止液滴的过大无法附着于导电细丝表面。减小微液滴的直径,使得微液滴表面积相对体积增大,由于放射性液体(通常为NaI)与导电细丝的结合为吸附反应,减小液滴直径有助于提高吸附反应效率。The present invention can control the size of the droplet by adjusting the voltage, and for the
使得距离导电喷嘴最近的接地导体为导电细丝,导电细丝可以在驱动机构下沿轴向旋转至设定的角度,以及沿轴向平移设定的距离。也可以导电细丝切割后,即得到放射性源芯,将源芯填入细管内并密封。即得到放射性籽源。本发明并不包括将截取分割的源芯加入细管内,并自动封存的技术。The grounding conductor closest to the conductive nozzle is a conductive filament, and the conductive filament can be rotated to a set angle in the axial direction under the driving mechanism, and can be translated to a set distance in the axial direction. The radioactive source core can also be obtained after the conductive filament is cut, and the source core is filled into the thin tube and sealed. That is, the radioactive seed source is obtained. The present invention does not include the technology of adding the cut and segmented source core into the thin tube and automatically sealing it.
附图说明Description of drawings
图1是本发明装置结构示意图。FIG. 1 is a schematic diagram of the structure of the device of the present invention.
图中:1、电源,2、供液模块,3、控制芯片,4、导电喷嘴,5、导电细丝,6、夹持装置7、CCD图像采集系统。In the figure: 1. Power supply, 2. Liquid supply module, 3. Control chip, 4. Conductive nozzle, 5. Conductive filament, 6. Clamping
图2是基于注射泵的供液模块,供液模块由控制芯片控制Figure 2 is a liquid supply module based on a syringe pump, and the liquid supply module is controlled by a control chip
图3是利用压差驱动液体流动的供液模块,供液模块由控制芯片控制Figure 3 is a liquid supply module that uses differential pressure to drive liquid flow, and the liquid supply module is controlled by a control chip
图4是实现导电细丝沿轴向转动和平移的夹持装置,导电细丝通过夹持装置保持与电源电极(通常为电源接地电极)的连接。FIG. 4 is a clamping device for realizing the axial rotation and translation of the conductive filament, and the conductive filament is kept connected to the power supply electrode (usually the power supply ground electrode) through the clamping device.
具体实施方式Detailed ways
下面结合实施例及附图对本发明进一步详细的描述The present invention will be described in further detail below in conjunction with the embodiments and the accompanying drawings
如图1所示,利用注射泵在电脑或其他控制器控制下控制放射性溶液的供液量。将电源1的正极施加在导电喷嘴4上,负极施加在导电细丝5上,通过施加电压,引入静电势差。随着电压的增加,导电喷嘴4上的溶液会变成半球形或椭圆体半月板液滴;随着电源1的电压逐渐增大,导电喷嘴4上的溶液表面电荷密度增大,电场力增大。当电源1继续增大,静电力和重力超过表面张力时,液滴将从导电喷嘴4离开,由于导电细丝是距离导电喷嘴最近的导电物体,电场主要分布在导电喷嘴与导电细丝之间,微液滴带有电荷,在电场作用下,液滴会被准确收集于导电细丝5上。这一特性防止微液滴喷射偏差导致的微液滴没有沉积在导电细丝上,造成放射性液体损失和环境污染。提高源芯的放射性剂量精度。As shown in Figure 1, a syringe pump is used to control the supply of radioactive solution under the control of a computer or other controller. The positive electrode of the
本发明还可通过调节供液模块2的移动速度,从而调节供液量,使电压1设置和供液流量达到匹配状态。液滴在电源1与供液量的相互作用下,尺寸均匀、产生频率稳定。The present invention can also adjust the liquid supply volume by adjusting the moving speed of the
本发明操作简单,成本低,只需在电场作用,可使溶液准确收集在导电细丝上,防止溶液的飞溅;本发明只需控制供液流量和电源1即可控制液滴的尺寸大小。The invention has simple operation and low cost, and only needs to act on the electric field, so that the solution can be accurately collected on the conductive filaments to prevent the solution from splashing;
导电细丝夹持装置6能够实现导电细丝5的绕轴向旋转、沿轴向平移。The conductive
微液滴喷射的一致性和稳定性,以及微液滴是否准确到达导电细丝均在控制芯片3的控制下,通过CCD图像采集系统得到证实。The consistency and stability of the ejection of micro-droplets, and whether the micro-droplets reach the conductive filaments accurately are all under the control of the
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605452.7A CN109754890B (en) | 2018-12-26 | 2018-12-26 | Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811605452.7A CN109754890B (en) | 2018-12-26 | 2018-12-26 | Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109754890A CN109754890A (en) | 2019-05-14 |
| CN109754890B true CN109754890B (en) | 2020-11-03 |
Family
ID=66404085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811605452.7A Expired - Fee Related CN109754890B (en) | 2018-12-26 | 2018-12-26 | Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109754890B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113522378B (en) * | 2020-04-13 | 2023-03-17 | 中国科学院青岛生物能源与过程研究所 | Microfluidic chip based on electrohydrodynamics, micro sample application device and method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108296059A (en) * | 2018-01-28 | 2018-07-20 | 北京工业大学 | Pneumatic droplet ejection state control system based on machine vision and method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6086942A (en) * | 1998-05-27 | 2000-07-11 | International Brachytherapy S.A. | Fluid-jet deposition of radioactive material for brachytherapy devices |
| CN101797392B (en) * | 2010-02-03 | 2012-03-07 | 原子高科股份有限公司 | Palladium-103 and io-125 compound sealed seed source, source core and source core preparation method |
| US9119887B2 (en) * | 2010-09-16 | 2015-09-01 | Mo-Sci Corporation | Low-density magnesium-aluminum-silicate (MAS) microparticles for radiotherapy and/or radioimaging |
| JPWO2016039064A1 (en) * | 2014-09-12 | 2017-08-24 | アルプス電気株式会社 | Concentrator for radioactive fluorine anion |
| CN108031573A (en) * | 2018-01-28 | 2018-05-15 | 北京工业大学 | The regulation and control method of single drop electrostatic spraying system steady operation |
| CN108831580B (en) * | 2018-08-22 | 2023-10-10 | 原子高科股份有限公司 | Device and method for automatically assembling and sealing radioactive particles |
-
2018
- 2018-12-26 CN CN201811605452.7A patent/CN109754890B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108296059A (en) * | 2018-01-28 | 2018-07-20 | 北京工业大学 | Pneumatic droplet ejection state control system based on machine vision and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109754890A (en) | 2019-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1156857C (en) | Method, device and radioactive fluid for producing radioactive elements using a jet printing head | |
| US5422926A (en) | X-ray source with shaped radiation pattern | |
| CN101466474B (en) | Electrostatic atomization device | |
| CN111481841A (en) | A flash radiotherapy device | |
| JP5297595B2 (en) | Needle-like body and method for producing needle-like body | |
| CN109754890B (en) | Method for manufacturing radioactive seed source core by utilizing electrohydrodynamic micro-droplet injection | |
| CN107723761B (en) | A kind of device and method of the fine electro-deposition of laser-impact piezoelectric ceramics localization | |
| BRPI0715568A2 (en) | Methods and apparatus for making coatings using ultrasonic spray deposition | |
| JPH08153669A (en) | Thin film forming method and forming apparatus | |
| TW200911380A (en) | An electrostatic spraying device and a method of electrostatic spraying | |
| US8872140B2 (en) | Target for generating carbon ions and treatment apparatus using the same | |
| CN114514341A (en) | Method and device for dry treatment of metal surfaces with electroactive solid particles | |
| DE102006037144B4 (en) | ECR plasma source | |
| CN104078566A (en) | Method for preparing polymer thin-film solar cell active layer through electrospinning | |
| US20130122183A1 (en) | Medical device coating apparatus and methods of use | |
| CN107195569A (en) | A kind of microplasma lithography device and method | |
| RU2597879C2 (en) | Device for automatic recovery of lithium target and method for automatic recovery of lithium target | |
| CN210381423U (en) | A device for macroscopic visualization of gas plasma in liquid | |
| DE102009052656A1 (en) | Application device for applying and irradiating a radiation-curable coating agent | |
| JP5176052B2 (en) | Radiation source target generation and supply equipment | |
| RU2219693C2 (en) | Seed treating apparatus | |
| EP2580784A2 (en) | Method and device for contacting a semiconductor substrate by means of a jet printing method | |
| CN104743527B (en) | Preparation method of bismuth selenide nano-particles | |
| JP2025088034A (en) | Micro-implement and manufacturing method thereof | |
| KR20190053716A (en) | Manufacturing apparatus and manufacturing method of reduced graphene oxide |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201103 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
