CN106815549B - Package structure and its manufacturing method - Google Patents

Package structure and its manufacturing method Download PDF

Info

Publication number
CN106815549B
CN106815549B CN201510918434.4A CN201510918434A CN106815549B CN 106815549 B CN106815549 B CN 106815549B CN 201510918434 A CN201510918434 A CN 201510918434A CN 106815549 B CN106815549 B CN 106815549B
Authority
CN
China
Prior art keywords
electronic component
substrate
sensing
insulating layer
sensing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510918434.4A
Other languages
Chinese (zh)
Other versions
CN106815549A (en
Inventor
唐绍祖
蔡岳颖
蔡瀛洲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siliconware Precision Industries Co Ltd
Original Assignee
Siliconware Precision Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siliconware Precision Industries Co Ltd filed Critical Siliconware Precision Industries Co Ltd
Publication of CN106815549A publication Critical patent/CN106815549A/en
Application granted granted Critical
Publication of CN106815549B publication Critical patent/CN106815549B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1306Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1329Protecting the fingerprint sensor against damage caused by the finger
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/111Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed
    • H10W74/114Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations
    • H10W74/117Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being completely enclosed by a substrate and the encapsulations the substrate having spherical bumps for external connection
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/0198Manufacture or treatment batch processes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Image Input (AREA)

Abstract

一种封装结构及其制法,该封装结构包括:基板、嵌埋于该基板中且具有感测面的电子组件、以及形成于该基板与该感测面上的绝缘层,通过该绝缘层覆盖该电子组件的感测面,以避免手指直接碰触该感测区,故能避免该感测面损毁而导致电子组件失效的问题。

Figure 201510918434

A package structure and a manufacturing method thereof, the package structure includes: a substrate, an electronic component embedded in the substrate and having a sensing surface, and an insulating layer formed on the substrate and the sensing surface, through the insulating layer The sensing surface of the electronic component is covered to prevent fingers from directly touching the sensing area, so that the problem of failure of the electronic component due to damage to the sensing surface can be avoided.

Figure 201510918434

Description

Package structure and method for fabricating the same
Technical Field
The present invention relates to a package structure, and more particularly, to a package structure of a fingerprint sensor and a method for fabricating the same.
Background
With the improvement of living standard, the degree of privacy emphasis of consumers is increasing day by day, and many advanced electronic products are equipped with identification systems to increase the security of data in the electronic products, so the development and design of identification systems are also the direction of electronic industry development along with consumer demands.
Today identification systems are mainly developed towards biometric systems (biometrics). In the biometric identification system, two types of biometric identification systems, i.e., physiological characteristics (e.g., fingerprint, pupil, face, voice print) and behavior characteristics (e.g., signature, voice) can be broadly classified according to different identification targets, wherein the biometric identification system for identifying the physiological characteristics has the advantages of singleness, high anti-counterfeiting degree, convenience, and the like, and thus is widely accepted by consumers.
In addition, since high-end electronic products are developed in the direction of high integration such as light, thin, short, small, etc., most of the biometric devices are fingerprint identification devices or face identification devices, and the fingerprint identification devices are most widely used, so as to achieve the purpose of making the electronic products light, thin, short, and small. In the conventional fingerprint recognition device, the scanning method of the fingerprint is divided into an optical fingerprint recognition device for scanning a fingerprint pattern and a silicon crystal fingerprint recognition device for detecting trace charges in the fingerprint pattern.
As shown in fig. 1, a conventional package structure 1 with a fingerprint image sensor (fingerprint sensor) includes a substrate 10 having a first electrical contact pad 101, a sensing chip 11 having a sensing region 110 and a second electrical contact pad 111, and an encapsulant 12 covering the sensing chip 11 and exposing the sensing region 110, so that a user can touch and slide (swipe) the sensing region 110 to sense a fingerprint.
Specifically, the sensing chip 11 is disposed on the substrate 10, and a plurality of bonding wires 13 are electrically connected to the first electrical contact pad 101 of the substrate 10 and the second electrical contact pad 111 of the sensing chip 11, and the encapsulant 12 is formed on the substrate 10 to seal the bonding wires 13.
However, since a finger of the silicon fingerprint image sensor directly touches the sensing area 110 of the sensing chip 11, the surface of the sensing area 110 is easily damaged, which shortens the lifetime of the conventional fingerprint image sensor.
Therefore, how to overcome the above problems in the prior art, increase the service life of the fingerprint image sensor, and satisfy the expectation of diversified package structures is a direction to be urgently developed in the industry.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention provides a package structure and a method for fabricating the same, which can avoid the problem of failure of the electronic component due to the damage of the sensing surface.
The packaging structure of the invention comprises: a substrate having a first surface and a second surface opposite to each other; the electronic component is embedded in the substrate, has opposite sensing surfaces and non-sensing surfaces and is electrically connected with the substrate; and an insulating layer formed on the first surface of the substrate and the sensing surface of the electronic component.
The invention also provides a manufacturing method of the packaging structure, which comprises the following steps: providing a substrate embedded with an electronic component, wherein the substrate is provided with a first surface and a second surface which are opposite, and the electronic component is provided with a sensing surface and a non-sensing surface which are opposite, so that the sensing surface of the electronic component is exposed out of the first surface of the substrate, and the electronic component is electrically connected with the substrate; and forming an insulating layer on the first surface of the substrate and the sensing surface of the electronic component.
In the foregoing package structure and the method for fabricating the same, the substrate has an opening communicating the first and second surfaces for placing the electronic component in the opening, so that a package body can be formed in the opening to cover the electronic component before the insulating layer is formed, wherein the package body is formed by compression molding or transfer molding.
In the foregoing package structure and the method for fabricating the same, the electronic component is a fingerprint sensing chip.
In the foregoing package structure and the manufacturing method thereof, the sensing surface of the electronic component is electrically connected to the substrate by wire bonding (wire bonding).
In the foregoing package structure and the method for fabricating the same, the insulating layer is formed by spraying.
In the foregoing package structure and the method for fabricating the same, the insulating layer is made of one of paint, ceramic, sapphire, glass, and zirconia.
Therefore, the package structure and the manufacturing method thereof cover the sensing surface of the electronic component through the insulating layer to prevent a finger from directly touching the sensing surface, so compared with the prior art, the package structure and the manufacturing method thereof can avoid the defect that the electronic component fails due to the damage of the sensing surface.
Drawings
FIG. 1 is a cross-sectional view of a conventional package structure; and
fig. 2A to fig. 2F are schematic cross-sectional views illustrating a manufacturing method of a package structure according to the present invention.
Description of the symbols
1,2 packaging structure
10,20 substrates
101,201 first electrical contact pad
11 sensing chip
110 sensing region
12 packaging colloid
13,23 welding line
111,202 second electrical contact pad
20a first surface
20b second surface
200 opening
21 electronic assembly
21a sensing surface
21b non-sensing surface
210 electrode pad
22 Package
24 insulating layer
25 conductive assembly
9 bonding layer.
Detailed Description
Other advantages and capabilities of the present invention will be apparent to those skilled in the art from the present disclosure by describing specific embodiments of the present invention in the following. The invention may be practiced or carried out in various other embodiments, and its several details are capable of modification in various, obvious aspects all without departing from the spirit of the invention.
It should be understood that the structures, proportions, and dimensions shown in the drawings and described in the specification are for illustrative purposes only and are not intended to limit the scope of the present invention, which is defined by the claims. The term "sensing surface" used herein means, but is not limited to, a surface having a sensing region in an electronic device, and similarly, a surface without a sensing region is a "non-sensing surface". In addition, the terms "above", "first", "second", and the like, referred to in the present specification, are for clarity of description only, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof may be made without substantial changes in the technical contents thereof.
Fig. 2A and 2F are schematic cross-sectional views illustrating a method for fabricating the package structure 2 according to the present invention.
As shown in fig. 2A, a substrate 20 is disposed on a bonding layer 9 such as a film (film) or a tape, and the substrate 20 has a first surface 20a and a second surface 20b opposite to each other, and is bonded to the bonding layer 9 by the first surface 20 a.
In the present embodiment, the substrate 20 has a plurality of openings 200 communicating the first and second surfaces 20a,20 b.
In addition, the substrate 20 is a circuit board, and has a first electrical contact pad 201 and a plurality of second electrical contact pads 202 on the first surface 20a and the second surface 20b, respectively.
As shown in fig. 2B, a plurality of electronic components 21 are respectively disposed in the openings 200.
In the present embodiment, the electronic component 21 has a sensing surface 21a and a non-sensing surface 21b opposite to each other, the sensing surface 21a has a sensing region (not shown) and an electrode pad 210 thereon, and the electronic component 21 is bonded to the bonding layer 9 by the sensing surface 21a thereof.
In addition, the electronic component 21 is a sensing chip, i.e. a sensing chip for detecting the change of the charge of the living body, the temperature difference, the pressure, etc., and more preferably a fingerprint identification chip, which can perform the biological identification through the capacitance difference received by the sensing surface 21 a.
As shown in fig. 2C, a package 22 is formed in each opening 200 to cover each electronic component 21, so that each electronic component 21 is embedded in the substrate 20. Then, the bonding layer 9 is removed, so that the sensing surface 21a of the electronic component 21 is exposed out of the first surface 20a of the substrate 20.
In the present embodiment, the method of forming the package body 22 is compression molding or transfer molding.
As shown in fig. 2D, a plurality of bonding wires 23 are respectively connected to each of the first electrical contact pads 201 and each of the electrode pads 210 by wire bonding, so that each of the electronic components 21 is electrically connected to the substrate 20.
As shown in fig. 2E, an insulating layer 24 is formed on the first surface 20a of the substrate 20 and the sensing surface 21a of the electronic component 21, such that the insulating layer 24 completely covers the bonding wires 23 and completely covers the sensing surface 21 a.
In the present embodiment, the method of forming the insulating layer 24 is a spraying method, and the material of the insulating layer 24 is paint (ink type or acryl type), ceramic, sapphire, glass or zirconia.
As shown in fig. 2F, a singulation process is performed along the cutting path S shown in fig. 2E to form the package structure 2 of the present invention, and a plurality of conductive elements 25, such as solder balls, are formed on the second electrical contact pads 202 of the second surface 20b of the substrate 20, so that the package structure 2 is bonded to an electronic device (not shown) through the plurality of conductive elements 25.
When using the fingerprint sensor with the package structure 2 of the present invention, the sensing surface 21a scans the received capacitance by touching the surface of the insulating layer 24 with a finger, such as charge variation, temperature difference, pressure, etc. for the electronic component 21 to recognize.
The invention provides a package structure 2, which includes a substrate 20, an electronic component 21, a package 22 and an insulating layer 24.
The substrate 20 has a first surface 20a and a second surface 20b opposite to each other, and an opening 200 communicating the first and second surfaces 20a,20 b.
The electronic component 21 is disposed in the opening 200 and has a sensing surface 21a and a non-sensing surface 21b opposite to each other, so that the sensing surface 21a of the electronic component 21 is exposed to the first surface 20a of the substrate 20, and the electronic component 21 is electrically connected to the substrate 20.
The package 22 is formed in the opening 200 to encapsulate the electronic component 21.
The insulating layer 24 is formed on the first surface 20a of the substrate 20 and the sensing surface 21a of the electronic component 21.
In one embodiment, the electronic component 21 is a fingerprint sensing chip.
In one embodiment, the sensing surface 21a of the electronic component 21 is electrically connected to the first surface 20a of the substrate 20 through at least one bonding wire 23.
In one embodiment, the insulating layer 24 is formed of paint, ceramic, sapphire, glass, or zirconia.
In summary, in the package structure 2 and the manufacturing method thereof of the present invention, the insulating layer 24 covers the sensing surface 21a of the electronic component 21 to prevent a finger from directly touching the sensing surface 21a of the electronic component 21, so compared with the prior art, the present invention can avoid the defect that the sensing surface 21a is damaged to cause the failure of the electronic component 21, thereby prolonging the life of the package structure 2.
In addition, the electronic component 21 is disposed in the opening 200, which not only reduces the overall height of the package structure 2, but also reduces the distance from the sensing surface 21a to the first surface 20a of the substrate 20, so as to improve the sensing sensitivity of the sensing surface 21 a.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Modifications and variations can be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the present invention. Therefore, the scope of the invention should be determined from the following claims.

Claims (8)

1.一种封装结构,其特征为,该封装结构包括:1. a package structure, it is characterized in that, this package structure comprises: 基板,其具有相对的第一表面与第二表面,且该基板具有连通第一与第二表面的开口;a base plate, which has an opposite first surface and a second surface, and the base plate has an opening communicating with the first and second surfaces; 电子组件,其置放于该开口中以嵌埋于该基板中,且具有相对的感测面及非感测面,并使该感测面以焊线电性连接该基板,其中,该电子组件的感测面与该基板的第一表面齐平;An electronic component is placed in the opening to be embedded in the substrate, and has opposite sensing surfaces and non-sensing surfaces, and the sensing surface is electrically connected to the substrate by bonding wires, wherein the electronic components The sensing surface of the component is flush with the first surface of the substrate; 封装体,其形成于该开口中以包覆该电子组件;以及a package body formed in the opening to enclose the electronic component; and 绝缘层,其形成于该封装体、该基板的第一表面与该电子组件的感测面上,使该绝缘层完全包覆该焊线及完全覆盖该感测面。An insulating layer is formed on the package body, the first surface of the substrate and the sensing surface of the electronic component, so that the insulating layer completely covers the bonding wire and the sensing surface. 2.如权利要求1所述的封装结构,其特征为,该电子组件为指纹感测芯片。2 . The package structure of claim 1 , wherein the electronic component is a fingerprint sensor chip. 3 . 3.如权利要求1所述的封装结构,其特征为,形成该绝缘层的材质为油漆、陶瓷、蓝宝石、玻璃或氧化锆的其中一者。3 . The package structure of claim 1 , wherein the insulating layer is formed of one of paint, ceramics, sapphire, glass or zirconia. 4 . 4.一种封装结构的制法,其特征为,该制法包括:4. A preparation method of a package structure, characterized in that the preparation method comprises: 提供一基板,其中,该基板具有相对的第一表面与第二表面及连通第一与第二表面的开口;A substrate is provided, wherein the substrate has opposite first and second surfaces and an opening communicating with the first and second surfaces; 置放电子组件于该开口中,且该电子组件具有相对的感测面及非感测面,以令该电子组件的感测面外露于该基板的第一表面,且该电子组件的感测面与该基板的第一表面齐平;An electronic component is placed in the opening, and the electronic component has opposite sensing surfaces and non-sensing surfaces, so that the sensing surface of the electronic component is exposed on the first surface of the substrate, and the sensing surface of the electronic component is the surface is flush with the first surface of the substrate; 于该开口中形成封装体,以包覆该电子组件,使该电子组件嵌埋于该基板中;forming a package body in the opening to cover the electronic component so that the electronic component is embedded in the substrate; 通过打线方式使该电子组件的感测面以焊线电性连接该基板;以及The sensing surface of the electronic component is electrically connected to the substrate by bonding wires by means of bonding wires; and 形成绝缘层于该封装体、该基板的第一表面与该电子组件的感测面上,使该绝缘层完全包覆该焊线及完全覆盖该感测面。An insulating layer is formed on the package body, the first surface of the substrate and the sensing surface of the electronic component, so that the insulating layer completely covers the bonding wire and the sensing surface. 5.如权利要求4所述的封装结构的制法,其特征为,形成该封装体的方法为模压成型或转注成型。5 . The method of claim 4 , wherein the method of forming the package body is compression molding or transfer molding. 6 . 6.如权利要求4所述的封装结构的制法,其特征为,该电子组件为指纹感测芯片。6 . The method of claim 4 , wherein the electronic component is a fingerprint sensor chip. 7 . 7.如权利要求4所述的封装结构的制法,其特征为,该绝缘层是以喷涂方式形成。7 . The method of claim 4 , wherein the insulating layer is formed by spraying. 8 . 8.如权利要求4所述的封装结构的制法,其特征为,形成该绝缘层的材质为油漆、陶瓷、蓝宝石、玻璃或氧化锆的其中一者。8 . The method of claim 4 , wherein the insulating layer is formed from one of paint, ceramics, sapphire, glass or zirconia. 9 .
CN201510918434.4A 2015-11-30 2015-12-11 Package structure and its manufacturing method Active CN106815549B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW104139901 2015-11-30
TW104139901A TWI591768B (en) 2015-11-30 2015-11-30 Package structure and its manufacturing method

Publications (2)

Publication Number Publication Date
CN106815549A CN106815549A (en) 2017-06-09
CN106815549B true CN106815549B (en) 2022-07-15

Family

ID=59106134

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510918434.4A Active CN106815549B (en) 2015-11-30 2015-12-11 Package structure and its manufacturing method

Country Status (2)

Country Link
CN (1) CN106815549B (en)
TW (1) TWI591768B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI688049B (en) * 2018-05-18 2020-03-11 矽品精密工業股份有限公司 Electronic package and manufacturing method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101150075A (en) * 2007-10-31 2008-03-26 日月光半导体制造股份有限公司 Carrier and method for manufacturing the same
CN101337652A (en) * 2008-08-11 2009-01-07 美新半导体(无锡)有限公司 Packaging of sensor element contact surfaces and packaging method thereof
CN101593761A (en) * 2008-05-29 2009-12-02 祥群科技股份有限公司 Sensing device with sealing glue protective layer and manufacturing method thereof
US20100032830A1 (en) * 2008-08-06 2010-02-11 Industrial Technology Research Institute Three-dimensional conducting structure and method of fabricating the same
CN102760715A (en) * 2011-04-28 2012-10-31 欣兴电子股份有限公司 Encapsulation Structure and Manufacturing Method of Embedded Electronic Components

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100468699C (en) * 2006-04-29 2009-03-11 联华电子股份有限公司 Image sensing element and manufacturing method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101150075A (en) * 2007-10-31 2008-03-26 日月光半导体制造股份有限公司 Carrier and method for manufacturing the same
CN101593761A (en) * 2008-05-29 2009-12-02 祥群科技股份有限公司 Sensing device with sealing glue protective layer and manufacturing method thereof
US20100032830A1 (en) * 2008-08-06 2010-02-11 Industrial Technology Research Institute Three-dimensional conducting structure and method of fabricating the same
CN101337652A (en) * 2008-08-11 2009-01-07 美新半导体(无锡)有限公司 Packaging of sensor element contact surfaces and packaging method thereof
CN102760715A (en) * 2011-04-28 2012-10-31 欣兴电子股份有限公司 Encapsulation Structure and Manufacturing Method of Embedded Electronic Components

Also Published As

Publication number Publication date
CN106815549A (en) 2017-06-09
TW201719813A (en) 2017-06-01
TWI591768B (en) 2017-07-11

Similar Documents

Publication Publication Date Title
JP2022106838A (en) Fingerprint detection module and its method
CN104303287B (en) Fingerprint sensor package and manufacturing method thereof
US10061962B2 (en) Fingerprint identification module and manufacturing method thereof
TWI537837B (en) Fingerprint identification chip package structure and manufacturing method thereof
TWI530885B (en) Full-surface sensor with exposed pigment layer and electronic device using the same
US9978673B2 (en) Package structure and method for fabricating the same
TW201611137A (en) Packaging structure and packaging method of fingerprint identification chip
CN103699881A (en) Fingerprint identification device and mobile terminal
US9542598B2 (en) Package structure and fabrication method thereof
TWM551756U (en) Fingerprint sensing and identification device with antistatic structure
US20170243045A1 (en) Fingerprint identification module and manufacturing method thereof
CN105655302A (en) Packaging structure and its manufacturing method
US11288476B2 (en) Fingerprint sensor package
CN106815549B (en) Package structure and its manufacturing method
CN116997905A (en) Fingerprint sensor module and method for manufacturing fingerprint sensor module
TWI612626B (en) Package structure and its manufacturing method
TWI689059B (en) Electronic package and method of manufacture
US11404361B2 (en) Method for fabricating package structure having encapsulate sensing chip
TWM504287U (en) Touch panel with fingerprint identification function
TWM486101U (en) All-flat sensor with exposed colorful member and electronic device using such sensor
US20240087355A1 (en) Ultrasonic fingerprint apparatus and electronic device
TWI620287B (en) Package structure and its manufacturing method
TWI242751B (en) Fingerprint sensor panel
TW201545070A (en) Fingerprint sensor device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant