CN105866061B - The anticoincidence pulse detection device and anticoincidence pulse detection method of THz wave time-domain information - Google Patents
The anticoincidence pulse detection device and anticoincidence pulse detection method of THz wave time-domain information Download PDFInfo
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Abstract
本发明提供了一种太赫兹波时域信息的异脉冲探测装置以及异脉冲探测方法,该异脉冲探测装置包括具有一定重复频率的飞秒激光产生部、分束部、太赫兹脉冲形成部、待检样品容纳部、太赫兹脉冲收集部、探测激光脉冲聚焦部、探测部、空间光程调制部、太赫兹脉冲还原部。由于空间光程调制部能够调节太赫兹脉冲与探测激光脉冲所经过的空间光程差,使得太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍,因而该方法能够在整个光路系统确定的情况下,根据被测物体大小实时调整光程差,使得整个系统的设计不再受被测物体大小限制,摆脱了传统太赫兹时域光谱系统对被测物体体积的限制。
The present invention provides a different pulse detection device and a different pulse detection method for terahertz wave time domain information. The different pulse detection device includes a femtosecond laser generating part with a certain repetition frequency, a beam splitting part, a terahertz pulse forming part, The sample holding part to be tested, the terahertz pulse collecting part, the probing laser pulse focusing part, the detecting part, the spatial optical path modulation part, and the terahertz pulse reducing part. Since the spatial optical path length modulation unit can adjust the spatial optical path difference between the terahertz pulse and the detection laser pulse, so that the difference between the terahertz pulse and the detection laser pulse arriving at the detection unit at the same time is an integer multiple of the adjacent pulse interval, the method can be used in When the entire optical path system is determined, the optical path difference is adjusted in real time according to the size of the measured object, so that the design of the entire system is no longer limited by the size of the measured object, and it gets rid of the limitation of the measured object volume by the traditional terahertz time-domain spectroscopy system.
Description
技术领域technical field
本发明属于太赫兹时域扫描领域,具体涉及一种太赫兹波时域信息的异脉冲探测装置及异脉冲探测方法。The invention belongs to the field of terahertz time-domain scanning, and in particular relates to a different-pulse detection device and a different-pulse detection method for terahertz wave time-domain information.
背景技术Background technique
太赫兹波由于其具有相对较弱的光子能量而被称为“无损伤探测”的光学波段。由于生物分子的旋动及振动能级(即指纹光谱)大多处于太赫兹波段,可以利用该波段光子对生物分子结构进行分析及操控。因此,太赫兹波在生物医学成像、物质成分检测和鉴定方面具有重要应用价值。但总体看,太赫兹波在这些方面的研究仍处于实验室阶段,大规模的应用还面临诸多挑战。如现有太赫兹辐射源的功率较低,将限制太赫兹波对待检物体的穿透性;周围环境对太赫兹辐射的干扰,如水蒸气的吸收;太赫兹波成谱成像速度有待提高。而其中,制约太赫兹系统真正迈向小型化、走向实用化的一个重要因素是太赫兹时域扫描方式。Due to its relatively weak photon energy, terahertz waves are called the optical band for "non-destructive detection". Since the rotational and vibrational energy levels of biomolecules (ie fingerprint spectrum) are mostly in the terahertz band, photons in this band can be used to analyze and manipulate the structure of biomolecules. Therefore, terahertz waves have important application value in biomedical imaging, detection and identification of material components. But overall, research on terahertz waves in these areas is still in the laboratory stage, and large-scale applications still face many challenges. If the power of the existing terahertz radiation source is low, it will limit the penetration of the terahertz wave to the object to be examined; the interference of the surrounding environment on the terahertz radiation, such as the absorption of water vapor; the imaging speed of the terahertz wave spectrum needs to be improved. Among them, an important factor that restricts the miniaturization and practicality of the terahertz system is the terahertz time-domain scanning method.
目前来说,太赫兹波时域信息的获得主要通过机械平移台的线性扫描。这种方法要求将激光光源输出的脉冲激光分成两束,其中一束作为泵浦光照射半导体天线,产生太赫兹辐射;另一束脉冲激光作为探测光照射到半导体天线,通过调节泵浦光与探测光所经过的空间光程,使产生的太赫兹脉冲与探测光的脉冲同时到达探测天线,然后利用机械平台平移的线性扫描完成探测光脉冲对太赫兹波时域信息的取样,从而还原出太赫兹波的时域信息。这种方法能够在较长的距离内实现精确的时域信息扫描,但是要求泵浦光与探测光之间的光程差必须相等,才能完成时域信息的扫描,因此光路设计与搭建过程极大的受限于光程差的要求;同时,整个系统对光程差的要求限制了被探测物体的体积,因此,极大的限制了其大规模应用。At present, the acquisition of terahertz wave time domain information is mainly through the linear scanning of the mechanical translation stage. This method requires that the pulsed laser output from the laser source be divided into two beams, one of which is used as pump light to irradiate the semiconductor antenna to generate terahertz radiation; the other beam of pulsed laser is irradiated to the semiconductor antenna as probe light. The spatial optical path of the detection light makes the generated terahertz pulse and the pulse of the detection light reach the detection antenna at the same time, and then use the linear scanning of the translation of the mechanical platform to complete the sampling of the time domain information of the detection light pulse to the terahertz wave, thereby restoring the Time-domain information of terahertz waves. This method can realize accurate time-domain information scanning over a long distance, but requires that the optical path difference between the pump light and the probe light must be equal to complete the time-domain information scanning, so the optical path design and construction process is extremely difficult. Larger is limited by the requirements of the optical path difference; at the same time, the requirements of the entire system for the optical path difference limit the volume of the object to be detected, thus greatly limiting its large-scale application.
发明内容Contents of the invention
本发明是为解决上述问题而进行的,在目前常用的时域扫描方式基础之上进行改进,提供了一种太赫兹波时域信息的异脉冲探测装置以及采用该装置进行太赫兹波时域信息的异脉冲探测方法。本发明采用了如下技术方案:The present invention is carried out to solve the above problems. It improves on the currently commonly used time-domain scanning method, and provides a device for detecting abnormal pulses of terahertz wave time-domain information and using the device to detect terahertz wave time-domain information. Different pulse detection method of information. The present invention adopts following technical scheme:
本发明提供了一种太赫兹波时域信息的异脉冲探测装置,具有:具有一定重复频率的飞秒激光产生部,输出重复频率稳定的飞秒激光;分束部,设置在重复频率被锁定的飞秒激光的光路上,用于将飞秒激光分成相互垂直的检测激光脉冲和探测激光脉冲;太赫兹脉冲形成部,设置在检测激光脉冲光路的上游,用于产生太赫兹辐射,形成太赫兹波;待检样品容纳部,设置在检测激光脉冲光路的下游,用于容纳待检样品;太赫兹脉冲收集部,用于对打在待检样品并被待检样品反射回的所述太赫兹脉冲进行收集;探测激光脉冲聚焦部,设置在探测激光脉冲光路的上游,用于对探测激光脉冲进行聚焦;探测部,同时探测在此合束的太赫兹脉冲以及探测激光脉冲的信息;空间光程调制部,调节太赫兹脉冲与探测激光脉冲所经过的空间光程,使太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍;以及太赫兹脉冲还原部,采用探测激光脉冲对与之同时到达探测部的太赫兹脉冲的时域信息进行取样扫描,并对太赫兹脉冲的时域信息进行还原。The invention provides a different pulse detection device for terahertz wave time domain information, which has: a femtosecond laser generating part with a certain repetition frequency, which outputs a femtosecond laser with a stable repetition frequency; The optical path of the femtosecond laser is used to divide the femtosecond laser into detection laser pulses and detection laser pulses perpendicular to each other; the terahertz pulse forming part is arranged upstream of the detection laser pulse optical path to generate terahertz radiation and form terahertz radiation. Hertz wave; the container for the sample to be inspected is arranged downstream of the detection laser pulse optical path, and is used to accommodate the sample to be inspected; Hertz pulses are collected; the detection laser pulse focusing part is set in the upstream of the detection laser pulse optical path, and is used to focus the detection laser pulse; the detection part detects the combined terahertz pulse and the information of the detection laser pulse at the same time; the space The optical path modulation part adjusts the spatial optical path passed by the terahertz pulse and the detection laser pulse, so that the difference between the terahertz pulse and the detection laser pulse arriving at the detection part at the same time is an integer multiple of the interval between adjacent pulses; and the terahertz pulse reduction part adopts The detection laser pulse samples and scans the time-domain information of the terahertz pulse arriving at the detection part at the same time, and restores the time-domain information of the terahertz pulse.
进一步的,具有一定重复频率的飞秒激光产生部包括:飞秒激光器,输出一定重复频率的飞秒激光,其谐振腔端部固定设置有压电陶瓷,用于泵浦光进入谐振腔后,形成拍频信号;光电探测器,设置在飞秒激光的光路上,捕获透过反射镜的飞秒激光,并采用可调谐偏转信号作为参考,与其探测得到的飞秒激光器的重复频率进行混频,产生一个代表激光器重复频率与标准频率差的误差信号;低通滤波器,对误差信号中的高频信号进行滤除,得到低频误差信号;前置放大器,对低频误差信号进行放大;环路控制器,在被放大的误差信号进入后输出补偿控制信号;以及调制升压放大器,驱动所述压电陶瓷产生位移量而改变腔长,让重复频率动态跟踪补偿控制信号,实现重复频率的锁定。Further, the femtosecond laser generating part with a certain repetition frequency includes: a femtosecond laser, which outputs a femtosecond laser with a certain repetition frequency, and the end of the resonant cavity is fixed with a piezoelectric ceramic for pumping light into the resonant cavity. A beat frequency signal is formed; the photodetector is set on the optical path of the femtosecond laser, captures the femtosecond laser passing through the mirror, and uses the tunable deflection signal as a reference to perform frequency mixing with the repetition frequency of the femtosecond laser detected by it , to generate an error signal representing the difference between the laser repetition frequency and the standard frequency; the low-pass filter filters out the high-frequency signal in the error signal to obtain a low-frequency error signal; the preamplifier amplifies the low-frequency error signal; the loop The controller outputs the compensation control signal after the amplified error signal enters; and modulates the boost amplifier to drive the piezoelectric ceramic to generate displacement to change the cavity length, so that the repetition frequency dynamically tracks the compensation control signal to realize the locking of the repetition frequency .
进一步的,本发明还提供了一种太赫兹波时域信息的异脉冲探测方法,包括以下步骤:Further, the present invention also provides a method for detecting different pulses of terahertz wave time domain information, including the following steps:
步骤1,采用飞秒激光器输出一定重复频率的飞秒激光,飞秒激光进入设置有压电陶瓷的谐振腔后,形成拍频信号;Step 1, using a femtosecond laser to output a femtosecond laser with a certain repetition rate, and forming a beat frequency signal after the femtosecond laser enters a resonant cavity provided with piezoelectric ceramics;
步骤2,采用光电探测器捕获透过反射镜的飞秒激光,并将可调谐偏转信号作为参考,与其探测得到的飞秒激光器的重复频率进行混频,产生一个代表激光器重复频率与标准频率差的误差信号;Step 2: Use a photodetector to capture the femtosecond laser passing through the mirror, and use the tunable deflection signal as a reference to mix with the repetition frequency of the femtosecond laser detected to generate a representative frequency difference between the laser repetition frequency and the standard frequency error signal;
步骤3,采用低通滤波器对误差信号中的高频信号进行滤除,得到低频误差信号;Step 3, using a low-pass filter to filter out the high-frequency signal in the error signal to obtain a low-frequency error signal;
步骤4,采用前置放大器对低频误差信号进行放大;Step 4, using a preamplifier to amplify the low-frequency error signal;
步骤5,采用环路控制器在被放大的所述误差信号进入后输出补偿控制信号;Step 5, using a loop controller to output a compensation control signal after the amplified error signal enters;
步骤6,采用调制升压放大器,驱动压电陶瓷产生位移量而改变腔长,让重复频率动态跟踪补偿控制信号,实现重复频率的锁定;Step 6, using a modulated boost amplifier to drive the piezoelectric ceramic to generate displacement to change the cavity length, so that the repetition frequency can dynamically track and compensate the control signal to realize the locking of the repetition frequency;
步骤7,采用分束部将重复频率锁定的飞秒激光分成相互垂直的检测激光脉冲和探测激光脉冲;Step 7, using a beam splitter to divide the repetition rate-locked femtosecond laser into mutually perpendicular detection laser pulses and detection laser pulses;
步骤8,采用太赫兹脉冲形成部产生太赫兹辐射,形成太赫兹波;Step 8, using a terahertz pulse forming part to generate terahertz radiation to form a terahertz wave;
步骤9,采用太赫兹脉冲收集部对打在待检样品并被待检样品反射回的太赫兹脉冲进行汇聚;Step 9, using a terahertz pulse collection unit to converge the terahertz pulses hit on the sample to be tested and reflected by the sample to be tested;
步骤10,采用探测激光脉冲聚焦部对经过透镜的所述探测激光脉冲进行聚焦;Step 10, using a detection laser pulse focusing unit to focus the detection laser pulse passing through the lens;
步骤11,采用探测部同时探测太赫兹脉冲以及所述探测激光脉冲的信息;Step 11, using the detection part to simultaneously detect the terahertz pulse and the information of the detected laser pulse;
步骤12,采用空间光程调制部调节所述太赫兹脉冲与探测激光脉冲所经过的空间光程差,使太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍;Step 12, using the spatial optical path length modulation unit to adjust the spatial optical path difference between the terahertz pulse and the detection laser pulse, so that the difference between the terahertz pulse and the detection laser pulse arriving at the detection unit at the same time is an integer multiple of the interval between adjacent pulses;
步骤13,采用太赫兹脉冲还原部,采用探测激光脉冲对与之同时到达探测部的太赫兹脉冲的时域信息进行取样扫描,并对太赫兹脉冲的时域信息进行还原。In step 13, the terahertz pulse restoration part is used to sample and scan the time-domain information of the terahertz pulse arriving at the detection part simultaneously with the detection laser pulse, and restore the time-domain information of the terahertz pulse.
另外,太赫兹波脉冲到达所述探测部的目标脉冲为第n-m个,所述探测激光脉冲到达所述探测部的目标脉冲为第n-w个,该两个脉冲同时到达所述探测部的光程差应满足的条件为:In addition, the target pulse of the terahertz wave pulse reaching the detection part is the n-mth one, the target pulse of the detection laser pulse reaching the detection part is the n-wth one, and the two pulses reach the optical path of the detection part at the same time The conditions to be met are:
Δ=(|(n-m)-(n-w)|)c*k/fΔ=(|(n-m)-(n-w)|)c*k/f
其中,n为整数,代表经过分束部后的第一个脉冲;c为激光的传播速度,即,光速;k为介质的折射率;f为飞秒激光器的重复频率;n-m代表太赫兹光路中到达探测部的脉冲是经过分束部后的第m个脉冲;n-w代表参考激光脉冲光路中到达探测部的脉冲是经过分束部后的第w个脉冲;。Among them, n is an integer, representing the first pulse after passing through the beam splitter; c is the propagation speed of the laser, that is, the speed of light; k is the refractive index of the medium; f is the repetition frequency of the femtosecond laser; n-m represents the terahertz optical path where the pulse reaching the detection part is the mth pulse after passing through the beam splitter; n-w means that the pulse arriving at the detection part in the reference laser pulse optical path is the wth pulse after passing through the beam splitter;
发明作用与效果Invention function and effect
根据本发明提供的太赫兹波时域信息的异脉冲探测装置以及太赫兹波时域信息的异脉冲探测方法,由于空间光程调制部能够调节太赫兹脉冲与探测激光脉冲所经过的空间光程差,使得太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍,因而该方法能够在整个光路系统确定的情况下,根据被测物体大小实时调整光程差,使得整个系统的设计不再受被测物体大小限制,摆脱了传统太赫兹时域光谱系统对被测物体体积的限制;同时,由于可以利用异脉冲进行探测,整个光学系统的设计更趋向于小型化、实用化;更重要的是,该方法打破了时域光谱系统只能进行近距离物质成分分析的限制,对近场、远场物质皆可实现太赫兹波的时域信息扫描,从而将太赫兹时域光谱分析拓展到远距离成分分析以及物质检测。According to the different pulse detection device of terahertz wave time domain information and the different pulse detection method of terahertz wave time domain information provided by the present invention, since the spatial optical path modulation unit can adjust the spatial optical path of the terahertz pulse and the detection laser pulse difference, so that the difference between the terahertz pulse and the detection laser pulse arriving at the detection part at the same time is an integer multiple of the adjacent pulse interval, so this method can adjust the optical path difference in real time according to the size of the object under the condition that the entire optical path system is determined, so that the entire The design of the system is no longer limited by the size of the measured object, and it gets rid of the limitation of the volume of the measured object by the traditional terahertz time-domain spectroscopy system; at the same time, because different pulses can be used for detection, the design of the entire optical system tends to be more miniaturized, Practical; more importantly, this method breaks the limitation that the time-domain spectroscopy system can only perform close-range material composition analysis, and can realize time-domain information scanning of terahertz waves for both near-field and far-field materials, so that terahertz Time-domain spectral analysis is extended to long-distance component analysis and substance detection.
附图说明Description of drawings
图1是本发明的太赫兹波时域信息的异脉冲探测装置的结构示意图;Fig. 1 is a structural schematic diagram of a different pulse detection device for terahertz wave time domain information of the present invention;
图2是本发明的具有一定重复频率的飞秒激光产生部的结构示意图;Fig. 2 is a schematic structural view of a femtosecond laser generator with a certain repetition rate of the present invention;
图3是本发明的空间调制部进行空间调制的原理图;FIG. 3 is a schematic diagram of the spatial modulation performed by the spatial modulation unit of the present invention;
图4是本发明的太赫兹波时域信息的异脉冲探测方法用于电光晶体取样探测太赫兹脉冲信号的结构示意图。Fig. 4 is a schematic diagram of the structure of the different pulse detection method for terahertz wave time domain information used in electro-optic crystal sampling and detection of terahertz pulse signals according to the present invention.
具体实施方式Detailed ways
以下结合附图来说明本发明的具体实施方式。The specific implementation manners of the present invention will be described below in conjunction with the accompanying drawings.
图1是本实施例的太赫兹波时域信息的异脉冲探测装置的结构示意图。FIG. 1 is a schematic structural diagram of a device for detecting abnormal pulses of terahertz wave time domain information in this embodiment.
如图1所示,太赫兹波时域信息的异脉冲探测装置100包括具有一定重复频率的飞秒激光产生部11、分束部12、凸透镜13、半导体天线14、抛物面镜15、高阻硅片16、待检样品容纳部17、太赫兹脉冲收集部18、探测部19、探测激光脉冲聚焦部20以及图中未显示出的空间光程调制部以及太赫兹脉冲还原部。其中,凸透镜13、半导体天线14、抛物面镜15、高阻硅片16组成了太赫兹脉冲形成部。As shown in Fig. 1, the abnormal pulse detection device 100 for terahertz wave time domain information includes a femtosecond laser generating part 11 with a certain repetition rate, a beam splitting part 12, a convex lens 13, a semiconductor antenna 14, a parabolic mirror 15, a high-resistance silicon The sheet 16, the sample storage part 17, the terahertz pulse collection part 18, the detection part 19, the detection laser pulse focusing part 20, the spatial optical path length modulation part and the terahertz pulse reduction part not shown in the figure. Among them, the convex lens 13, the semiconductor antenna 14, the parabolic mirror 15, and the high-resistance silicon chip 16 constitute the terahertz pulse forming part.
图2为本实施例中的具有一定重复频率的飞秒激光产生部的结构示意图。FIG. 2 is a schematic structural diagram of a femtosecond laser generator with a certain repetition rate in this embodiment.
如图2所示,具有一定重复频率的飞秒激光产生部11包括飞秒激光器111、光电探测器112、低通滤波器113、前置放大器114、环路控制器115以及调制升压放大器116。As shown in Figure 2, the femtosecond laser generator 11 with a certain repetition rate includes a femtosecond laser 111, a photodetector 112, a low-pass filter 113, a preamplifier 114, a loop controller 115, and a modulation boost amplifier 116 .
飞秒激光器111产生一定重复频率的飞秒激光,其谐振腔端部固定设置有压电陶瓷(PZT),用于泵浦光进入谐振腔后,形成拍频信号,频率为拍频信号的整数倍;光电探测器112设置在所述飞秒激光的光路上,其捕获极少量透过反射镜的飞秒激光,并采用可调谐偏转信号作为参考,与其探测得到的飞秒激光器的重复频率进行混频,产生一个代表激光器重复频率与标准频率差的误差信号;低通滤波器113用于对光电探测器产生的误差信号中的高频信号进行滤除,得到低频误差信号;前置放大器114用于对该低频误差信号进行放大;环路控制器115用于在该被放大的所述误差信号进入后输出补偿控制信号;调制升压放大器116用于驱动压电陶瓷产生位移量而改变腔长,从而让重复频率动态跟踪补偿控制信号,实现重复频率的锁定。The femtosecond laser 111 generates a femtosecond laser with a certain repetition frequency, and the end of the resonant cavity is fixed with a piezoelectric ceramic (PZT), which is used to form a beat frequency signal after the pump light enters the resonant cavity, and the frequency is an integer of the beat frequency signal times; the photodetector 112 is arranged on the optical path of the femtosecond laser, which captures a very small amount of femtosecond laser passing through the reflector, and uses the tunable deflection signal as a reference to perform the femtosecond laser repetition rate detected by it. Frequency mixing generates an error signal representing the difference between the laser repetition rate and the standard frequency; the low-pass filter 113 is used to filter out the high-frequency signal in the error signal generated by the photodetector to obtain a low-frequency error signal; the preamplifier 114 It is used to amplify the low-frequency error signal; the loop controller 115 is used to output the compensation control signal after the amplified error signal enters; the modulation boost amplifier 116 is used to drive the piezoelectric ceramic to generate displacement and change the cavity Long, so that the repetition frequency dynamically tracks the compensation control signal, and realizes the locking of the repetition frequency.
如图1所示,分束部12设置在重复频率被锁定的飞秒激光的光路上,用于将飞秒激光分成相互垂直的检测激光脉冲和探测激光脉冲。本实施例中,分束部为780nm分束片。As shown in FIG. 1 , the beam splitter 12 is arranged on the optical path of the femtosecond laser whose repetition rate is locked, and is used to divide the femtosecond laser into detection laser pulses and detection laser pulses that are perpendicular to each other. In this embodiment, the beam splitter is a 780nm beam splitter.
太赫兹脉冲形成部由凸透镜13、半导体天线14、抛物面镜15、高阻硅片16组成。凸透镜13对检测激光脉冲进行聚焦,半导体天线14被聚焦后的检测激光脉冲照射后,产生太赫兹辐射,形成太赫兹波,抛物面镜15用于对太赫兹波进行收集并汇聚,高阻硅片16对太赫兹波进行过滤,使得所需频率的太赫兹波透过。在本实施例中,抛物面镜15为镀金离轴抛物面镜。The terahertz pulse forming part is composed of a convex lens 13 , a semiconductor antenna 14 , a parabolic mirror 15 , and a high-resistance silicon chip 16 . The convex lens 13 focuses the detection laser pulse, and the semiconductor antenna 14 is irradiated by the focused detection laser pulse to generate terahertz radiation and form a terahertz wave. The parabolic mirror 15 is used to collect and converge the terahertz wave. The high-resistance silicon wafer 16 filters the terahertz wave so that the terahertz wave of the desired frequency passes through. In this embodiment, the parabolic mirror 15 is a gold-plated off-axis parabolic mirror.
待检样品容纳部17和高阻硅片临近,用于容纳待检样品。太赫兹脉冲汇收集18用于对打在待检样品并被待检样品反射回的太赫兹脉冲进行收集。本实施例中,太赫兹脉冲汇聚部18为镀金离轴抛物面镜。The sample holding portion 17 is adjacent to the high-resistance silicon chip and is used to hold the sample to be tested. The terahertz pulse sink collection 18 is used to collect the terahertz pulses hit on the sample to be inspected and reflected back by the sample to be inspected. In this embodiment, the terahertz pulse converging part 18 is a gold-plated off-axis parabolic mirror.
探测激光脉冲聚焦部20设置在探测激光脉冲光路的上游,用于对探测激光脉冲进行汇聚。在本实施例中,探测激光脉冲聚焦部20为凸透镜。The probing laser pulse focusing unit 20 is arranged upstream of the probing laser pulse optical path for converging the probing laser pulses. In this embodiment, the detection laser pulse focusing part 20 is a convex lens.
探测部用于对同时到达的太赫兹脉冲以及探测激光脉冲同时进行探测;空间光程调制部用于调节太赫兹脉冲与探测激光脉冲所经过的空间光程,使太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍;太赫兹脉冲还原部,采用探测激光脉冲对与之同时到达探测部的太赫兹脉冲的时域信息进行取样扫描,并对太赫兹脉冲的时域信息进行还原,得到待检样品的成分信息。The detection part is used to simultaneously detect the terahertz pulse and the detection laser pulse arriving at the same time; the spatial optical path modulation part is used to adjust the spatial optical path of the terahertz pulse and the detection laser pulse, so that the terahertz pulse reaches the detection part at the same time The difference between the detection laser pulses is an integer multiple of the interval between adjacent pulses; the terahertz pulse reduction part uses the detection laser pulse to sample and scan the time-domain information of the terahertz pulse that arrives at the detection part at the same time, and the time-domain information of the terahertz pulse The information is restored to obtain the composition information of the sample to be tested.
图3为本实施例中的空间调制部进行空间调制的原理图。FIG. 3 is a schematic diagram of the spatial modulation performed by the spatial modulation unit in this embodiment.
如图1和图3所示,假设太赫兹光路中到达探测部的脉冲为第n-5个,参考激光脉冲光路中到达探测部的脉冲为第n-8个,该两个脉冲同时到达探测部的光程差应满足的条件为:As shown in Figure 1 and Figure 3, it is assumed that the pulse arriving at the detection part in the terahertz optical path is the n-5th pulse, and the pulse arriving at the detecting part in the reference laser pulse optical path is the n-8th pulse, and the two pulses arrive at the detection part at the same time The optical path difference of the part should meet the following conditions:
Δ=(|(n-5)-(n-8)|)c*k/f=3c*k/fΔ=(|(n-5)-(n-8)|)c*k/f=3c*k/f
其中,n为整数,代表经过分束部后的第一个脉冲;n-5代表太赫兹光路中到达探测部的脉冲是经过分束部后的第五个脉冲;n-8代表参考激光脉冲光路中到达探测部的脉冲是经过分束部后的第八个脉冲;c为激光的传播速度,即,光速;k为介质的折射率;f为飞秒激光器的重复频率。Among them, n is an integer, representing the first pulse after passing through the beam splitter; n-5 represents that the pulse reaching the detection part in the terahertz optical path is the fifth pulse after passing through the beam splitter; n-8 represents the reference laser pulse The pulse that reaches the detection part in the optical path is the eighth pulse after passing through the beam splitter; c is the propagation speed of the laser, that is, the speed of light; k is the refractive index of the medium; f is the repetition rate of the femtosecond laser.
空间调制部只需按照上述公式进行光程差的调制即可实现两个不同的脉冲同时达到目标物。此时,可以利用第(n-8)个探测激光脉冲完成第(n-5)个太赫兹脉冲的时域信号取样扫描,从而还原出太赫兹脉冲。The spatial modulation unit only needs to modulate the optical path difference according to the above formula to realize that two different pulses reach the target object at the same time. At this time, the (n-8)th detection laser pulse can be used to complete the time-domain signal sampling scanning of the (n-5)th terahertz pulse, thereby restoring the terahertz pulse.
在传统的调节方法中,由于传统的太赫兹时域探测方式激光光源重复频率不锁定,必须控制探测光路同时到达目标的脉冲也是第n-5个才能在目标点合束,然后利用机械平移台的线性扫描完成探测光脉冲对太赫兹波时域信息的取样,从而还原出太赫兹波的时域信息。In the traditional adjustment method, since the traditional terahertz time-domain detection method does not lock the repetition frequency of the laser source, it is necessary to control the detection optical path and the pulse that reaches the target at the same time is also the n-5th pulse to combine at the target point, and then use the mechanical translation stage The linear scanning of the detection light pulse samples the time-domain information of the terahertz wave, thereby restoring the time-domain information of the terahertz wave.
图4是本实施例的太赫兹波时域信息的异脉冲探测方法用于电光晶体取样探测太赫兹脉冲信号的结构示意图。FIG. 4 is a schematic structural diagram of the method for detecting different pulses of terahertz wave time domain information in this embodiment for sampling and detecting terahertz pulse signals by electro-optic crystals.
以下以具体例子对太赫兹波时域信息的异脉冲探测方法进行详细说明。The method for detecting abnormal pulses of terahertz wave time domain information will be described in detail below with specific examples.
如图4所示,电光晶体取样探测太赫兹脉冲信号的光路包括重复频率精确锁定的飞秒激光器11、分束部12、凸透镜13、半导体天线14、抛物面镜15、高阻硅片16、待检样品容纳部17、太赫兹脉冲收集部18、探测激光脉冲聚焦部20、电光晶体碲化锌(ZnTe)21、1/4波片22;PBS偏振分光棱镜23、光电探头PD24。As shown in Figure 4, the optical path of the electro-optic crystal for sampling and detecting terahertz pulse signals includes a femtosecond laser 11 whose repetition rate is precisely locked, a beam splitter 12, a convex lens 13, a semiconductor antenna 14, a parabolic mirror 15, a high-resistance silicon wafer 16, and a Sample holding part 17, terahertz pulse collecting part 18, probe laser pulse focusing part 20, electro-optic crystal zinc telluride (ZnTe) 21, 1/4 wave plate 22; PBS polarization beam splitter prism 23, photoelectric probe PD24.
如图2和图4所示,采用太赫兹波时域信息的异脉冲探测方法对电光晶体取样探测太赫兹脉冲信号的方法包括如下步骤:As shown in Figure 2 and Figure 4, the method for sampling and detecting terahertz pulse signals by electro-optic crystals using the different pulse detection method of terahertz wave time domain information includes the following steps:
步骤1,飞秒激光器111输出一定重复频率的飞秒激光,该飞秒激光作为泵浦光进入谐振腔后,形成拍频信号;Step 1, the femtosecond laser 111 outputs a femtosecond laser with a certain repetition frequency, and the femtosecond laser enters the resonant cavity as pump light to form a beat frequency signal;
步骤2,光电探测器112捕获透过反射镜的飞秒激光,并将可调谐偏转信号作为参考,与其探测得到的飞秒激光器的重复频率进行混频,产生一个代表激光器重复频率与标准频率差的误差信号;In step 2, the photodetector 112 captures the femtosecond laser light passing through the reflector, and uses the tunable deflection signal as a reference, and performs frequency mixing with the repetition frequency of the femtosecond laser detected by it to generate a signal representing the difference between the repetition frequency of the laser and the standard frequency error signal;
步骤3,低通滤波器113对误差信号中的高频信号进行滤除,得到低频误差信号;Step 3, the low-pass filter 113 filters out the high-frequency signal in the error signal to obtain a low-frequency error signal;
步骤4,前置放大器114对低频误差信号进行放大;Step 4, the preamplifier 114 amplifies the low-frequency error signal;
步骤5,环路控制器115在被放大的所述误差信号进入后输出补偿控制信号;Step 5, the loop controller 115 outputs a compensation control signal after the amplified error signal enters;
步骤6,调制升压放大器116驱动压电陶瓷产生位移量而改变腔长,让重复频率动态跟踪补偿控制信号,实现重复频率的锁定;Step 6, modulating the step-up amplifier 116 to drive the piezoelectric ceramic to generate displacement to change the cavity length, so that the repetition frequency can dynamically track the compensation control signal to realize the locking of the repetition frequency;
步骤7,分束部12将重复频率锁定的飞秒激光分成相互垂直的检测激光脉冲和探测激光脉冲;Step 7, the beam splitter 12 divides the repetition rate locked femtosecond laser into mutually perpendicular detection laser pulses and detection laser pulses;
步骤8,检测激光脉冲经凸透镜13进行聚焦后照射在半导体天线14上,产生太赫兹辐射,形成太赫兹波。太赫兹波由抛物面镜15收集并汇聚后,被高阻硅片16进行分束过滤,使得所需频率的太赫兹波透过。Step 8, the detection laser pulse is focused by the convex lens 13 and then irradiated on the semiconductor antenna 14 to generate terahertz radiation and form a terahertz wave. After the terahertz wave is collected and converged by the parabolic mirror 15 , it is split and filtered by the high-resistance silicon chip 16 , so that the terahertz wave of the required frequency can pass through.
步骤9,太赫兹波的透过部分打到待检样品容纳部17中的待检样品上并被反射,反射回的太赫兹脉冲再次经过高阻硅片16被反射到太赫兹脉冲收集部18上。太赫兹脉冲收集部18位于探测激光脉冲的光路上,其也为镀金抛物面镜,反射回的太赫兹脉冲经抛物面镜收集汇聚于电光晶体碲化锌21;Step 9, the transmitted part of the terahertz wave hits the sample to be tested in the sample storage part 17 and is reflected, and the reflected terahertz pulse is reflected to the terahertz pulse collection part 18 through the high-resistance silicon chip 16 again superior. The terahertz pulse collection part 18 is located on the optical path of the detection laser pulse, which is also a gold-plated parabolic mirror, and the reflected terahertz pulse is collected by the parabolic mirror and converged on the electro-optic crystal zinc telluride 21;
步骤10,探测激光脉冲聚焦部22对探测激光脉冲进行聚焦后的探测激光脉冲穿过太赫兹脉冲收集部18,也被汇聚在电光晶体碲化锌21上;Step 10, after the detection laser pulse focusing part 22 focuses the detection laser pulse, the detection laser pulse passes through the terahertz pulse collection part 18, and is also converged on the electro-optic crystal zinc telluride 21;
步骤11,空间光程调制部调节太赫兹脉冲与探测激光脉冲所经过的空间光程差,使太赫兹脉冲与同时到达电光晶体碲化锌21的探测激光脉冲相差相邻脉冲间隔的整数倍;Step 11, the spatial optical path modulation unit adjusts the spatial optical path difference between the terahertz pulse and the detection laser pulse, so that the difference between the terahertz pulse and the detection laser pulse arriving at the electro-optic crystal zinc telluride 21 at the same time is an integer multiple of the interval between adjacent pulses;
步骤12,碲化锌晶体21在太赫兹脉冲的影响下具有双折射效应,两束光路汇聚后经过1/4波片22调节偏振,并由PBS分束镜23分束后由光电探头PD24进行收集探测,利用线性平移台扫描完成样品信息探测。Step 12: Zinc telluride crystal 21 has a birefringence effect under the influence of terahertz pulses. After the two beams are converged, the polarization is adjusted by 1/4 wave plate 22, and the beam is split by PBS beam splitter 23 and then by photoelectric probe PD24. Collect and detect, and use the linear translation stage to scan to complete the sample information detection.
实施例作用与效果Function and effect of embodiment
根据本实施例提供的太赫兹波时域信息的异脉冲探测装置以及太赫兹波时域信息的异脉冲探测方法,由于空间光程调制部能够调节太赫兹脉冲与探测激光脉冲所经过的空间光程差,使得太赫兹脉冲与同时到达探测部的探测激光脉冲相差相邻脉冲间隔的整数倍,因而该方法能够在整个光路系统确定的情况下,根据被测物体大小实时调整光程差,使得整个系统的设计不再受被测物体大小限制,摆脱了传统太赫兹时域光谱系统对被测物体体积的限制;同时,由于可以利用异脉冲进行探测,整个光学系统的设计更趋向于小型化、实用化;更重要的是,该方法打破了时域光谱系统只能进行近距离物质成分分析的限制,对近场、远场物质皆可实现太赫兹波的时域信息扫描,从而将太赫兹时域光谱分析拓展到远距离成分分析以及物质检测。According to the device for detecting different pulses of terahertz wave time-domain information and the method for detecting different pulses of terahertz wave time-domain information provided in this embodiment, since the spatial optical path modulation unit can adjust the spatial light passing through the terahertz pulse and the detection laser pulse path difference, so that the difference between the terahertz pulse and the detection laser pulse arriving at the detection part at the same time is an integer multiple of the adjacent pulse interval, so this method can adjust the optical path difference in real time according to the size of the measured object under the condition that the entire optical path system is determined, so that The design of the whole system is no longer limited by the size of the measured object, and it gets rid of the limitation of the volume of the measured object by the traditional terahertz time-domain spectroscopy system; at the same time, because different pulses can be used for detection, the design of the entire optical system tends to be more miniaturized , practicability; more importantly, this method breaks the limitation that the time-domain spectroscopy system can only analyze the composition of materials at close range, and can realize the time-domain information scanning of terahertz waves for both near-field and far-field materials, so that the terahertz wave Hertz time-domain spectral analysis is extended to long-distance component analysis and material detection.
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| CN104620094A (en) * | 2012-09-24 | 2015-05-13 | 株式会社爱德万测试 | Optical measuring device, method, program, and recording medium |
| CN102868080A (en) * | 2012-10-22 | 2013-01-09 | 上海理工大学 | Device capable of generating high terahertz pulse through external cavity resonance enhancement |
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