CN102221348A - Spherical Absolute Measurement Method Based on Multi-feature Matching and Averaging Method - Google Patents
Spherical Absolute Measurement Method Based on Multi-feature Matching and Averaging Method Download PDFInfo
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Abstract
本发明公开了一种基于多特征匹配和平均法的球面绝对测量方法，该方法通过对一个“猫眼”位置干涉测量和多个共焦位置干涉测量结果进行数据处理直接获得与参考面误差无关的被测球面光学元件面形误差信息。多特征匹配根据设置在被测球面光学元件表面的多个特征标记在共焦位置测量数据中形成的特征形状进行准确的旋转角度控制和数据匹配，然后将多组由“猫眼”位置测量、被测球面光学元件某一共焦位置测量和与之相对旋转180度后共焦位置测量组成的三位置法计算结果进行平均处理，以提高被测球面光学元件绝对面形误差的准确性。本发明无需复杂的调整机构和辅助对准装置，同时可避免反复进行光路调整，在实际操作中的方便性和绝对测量结果的准确性之间保持了较好的平衡，具有较大的应用价值。
The invention discloses an absolute spherical surface measurement method based on multi-feature matching and averaging method. The method directly obtains the reference surface error independent of the reference surface by performing data processing on a "cat's eye" position interferometry and multiple confocal position interferometry results. The surface shape error information of the measured spherical optical element. Multi-feature matching performs accurate rotation angle control and data matching according to the feature shape formed in the confocal position measurement data by multiple feature marks set on the surface of the spherical optical element under test, and then multiple groups are measured by the "cat's eye" position, and are measured The calculation results of the three-position method consisting of the measurement of a certain confocal position of the spherical optical element and the measurement of the confocal position after a relative rotation of 180 degrees are averaged to improve the accuracy of the absolute surface error of the measured spherical optical element. The present invention does not require complex adjustment mechanisms and auxiliary alignment devices, and can avoid repeated optical path adjustments, maintains a good balance between the convenience in actual operation and the accuracy of absolute measurement results, and has great application value .
Description
Technical field
The present invention relates to a kind of sphere absolute method of measurement, belong to the advanced optical length of schooling and make and the detection technique field.
Background technology
The spherical optics element has a very wide range of applications in optical system, how to realize that still there is certain challenge in the detection of high precision sphere optical component surface shape.Feisuo type phase shifting interferometer is the main flow equipment that present face shape is detected.The ultimate principle of interferometry is to carry the test light of the measured optical unit face shape error information and the reference light of reference surface reflected back interferes, and then interferogram carried out data processing to calculate the phase value of reflected measurement control information, by reference surface is carried out relative measurement as desirable measurement " scale ", so interferometer face shape accuracy of detection mainly is subjected to the influence of reference surface precision.Absolute method of measurement is a kind of effective means of interfering accuracy of detection that promotes by to repeatedly interfering the relative measurement result to carry out data processing to isolate the measured optical unit face shape error information.
Realize that the sphere absolute measurement has two kinds of strategies usually, a kind of is to demarcate the reference surface face shape error, deducts the reference surface face shape error then and can obtain and the irrelevant absolute measurement result of reference surface self precision from the relative measurement result of tested spherical optics element.Reference surface scaling method commonly used has method of spherical means, odd even decomposition method and binary channels self-calibrating method at random.People such as P.E.Parks (P.E.Parks, C.J.Evans, L.Shao, " Calibration of interferometer transmission spheres; " Optical Fabrication and Testing Workshop, OSA Technical Digest Series 12,80-83,1998.) a kind of method of ball at random of demarcating standard lens reference surface face shape error has been proposed, this method averages data processing then by a spherical displacer is carried out relative measurement at a large amount of random sites, the error of spherical displacer is along with the increase of measuring number of times goes to zero, and average treatment result will mainly reflect standard lens face shape error information.People (Ulf Griesmann such as Ulf Griesmann, Quandou wang, Johannes Soons, et al. " A simple ball average for reference sphere calibrations ", Proc.SPIE, 5869:58690S1-S8,2005.) reported a kind of device for carrying out said of the method for ball at random.The ball method can only be used to produce the error calibration of the recessed standard lens of convergent beam at random.People such as R.Schreiner (R.Schreiner, J.Schwider, Nlindlein, et al. " Absolute testing of the reference surface of a Fizeau interferometer through even/odd decompositions; " Appl.Opt.47,6134-6141,2008.) a kind of odd even decomposition method based on half screen has been proposed, can calibrate the reference surface face shape error.Afterwards, people (Jan Burke such as Jan Burke, David S.Wu, " Calibration of spherical reference surfaces for Fizeau interferometry:a comparative study of methods; " Appl.Opt.49,6014-6023,2010.) the binary channels self-calibrating method based on half screen has been proposed, can calibrate the even error of reference surface fast.
The another kind of strategy of realizing the sphere absolute measurement be to repeatedly relatively the interferometer measurement result carry out the face shape error that data processing is directly isolated tested spherical optics element, usual method has three position methods and translation rotary process.1973, A.E.Jensen (A.E.Jensen, " Absolute calibration method for laser Twyman-Green wave-front testing interferometers; " J.Opt.Soc.Am.63:1313A, 1973.) a kind of three position methods that realize the sphere absolute measurement have at first been proposed, this method to tested spherical optics element in confocal position, confocal position behind the Rotate 180 degree, relative measurement is carried out in " opal " position, isolate tested spherical optics element face shape error by data processing then, this method is comparatively responsive to adjusting error.Nineteen ninety, people (Proc.SPIE 1400 for Bruce E.Truax, Absolute interferometric testing of spherical surfaces, 61-68,1990.) such as Bruce E.Truax have reported the theoretical formula derivation of three position methods.Afterwards, L.A.Selberg (the L.A.Selberg of U.S. Zygo company, " Absolute testing of spherical surfaces; " Optical Fabrication and Testing Workshop, OSATechnical Digest Series 13,181-184,1994.) above-mentioned three position methods are expanded to five position methods, this method is in tested spherical optics element confocal position 0,90,180, relative measurement is carried out in four positions of 270 degree and " opal " position, isolate tested spherical optics element face shape error by data processing then, this method can reduce the measured optical unit to a certain extent and adjust error effect in rotary course.In eighties of last century nineties, (the Manual of Zygo company, Two Sphere Application Booklet, Zygo Corporation, 1996.) developed the commercial applications software package of " Two-Sphere " by name based on above-mentioned five position law theory achievements in research, this software package need adopt a special cross hair with the reference point of measurement data center as data processing in reality is implemented.Three position methods and five position methods are mainly challenged and are to adopt " opal " measuring position, and test wavefront the light path counter-rotating will take place in this position causes not satisfying light path condition altogether; The adjustment error of opal position will cause occurring wrong coordinate coupling in the data handling procedure in addition, and then produce inaccurate result of calculation.In addition, how to guarantee that having the correct anglec of rotation when repeatedly confocal position is measured also exists certain difficulty.In order to satisfy accurate confocal position measurement requirement, people (Karl Edmund Elssner such as Karl Edmund Elssner, R.Burow, J.Grzanna, et al. " Absolute sphericity measurement, " Appl.Opt.28,4649-4661,1989.) reported a kind of octuple adjusting gear, but along with its adjustment of increase of the measured optical unit numerical aperture becomes difficult more.In order to simplify three location measurement methods, people such as K.Creath (K.Creath and J.Wyant, " Testing spherical surfaces:a fast; quasi-absolute technique; " Appl.Opt.31,4350-4354,1992.) reported based on " opal " position measurement and the accurate absolute method of measurement of two positions that confocal position is measured, but this method can only calibrate the even error of the measured optical unit.Also carried out some theory and experimental studies at home, do not seen the practical engineering application report based on the sphere absolute method of measurement of three position methods.
In addition, people (Bernd Dorband such as Bernd Dorband, G ü nther Seitz, " Interferometric testing of optical surfaces at its current limit ", Optik, 112 (9): 392-398,2001.) reported a kind of translation rotary process, this method is carried out relative measurement when confocal position different rotary angle and the transverse translation to tested spherical optics element, calculate the rotation symmetry and the asymmetric part of tested spherical optics element face shape error respectively by data processing, synthesize the aforementioned calculation result then and can obtain the measured optical unit face shape error information.The translation rotary process is avoided using " opal " position, and has very large range of application.Yet this measuring method need detect with the interference of satisfying after accurate rotation and the translation zero high-accuracy sextuple adjusting gear on a large scale, simultaneously data processing method complexity comparatively.
In sum, absolute method of measurement is a kind of effective ways that improve sphere face shape accuracy of detection.Based on " opal " position measurement and repeatedly the absolute method of measurement measured of confocal position can realize the absolute measurement of tested sphere face shape having bigger actual application value, the method for current this principle of employing has three position methods and five position methods.Three position methods need adopt complicated octuple adjustment rack to adjust to realize that correct confocal position is measured; Five position methods as reference point, and require that significant change does not take place interference fringe in the rotary course with the measurement data center, and this needs to expend the plenty of time and carries out light path and adjust repeatedly in practical operation.
Summary of the invention
The objective of the invention is to overcome the technological deficiency that has now based on the sphere absolute measurement of " opal " measurement and three times or five times confocal measurements, realize having the confocal position measurement of the correct anglec of rotation in actual measurement quickly and easily, the present invention proposes a kind of sphere absolute method of measurement based on the many characteristic matching and the method for average for this reason.
For achieving the above object, the technical scheme of the sphere absolute method of measurement based on the many characteristic matching and the method for average provided by the invention comprises that step is as follows:
The first step: installation code camera lens, tested spherical optics element, sextuple adjustment rack in regular turn on the optical axis of Feisuo type phase shifting interferometer, tested spherical optics element, sextuple adjustment rack place on the electronic control translation stage, electronic control translation stage is connected with computer control and data handling system respectively with driver, and Feisuo type phase shifting interferometer is connected with computer control and data handling system; Three and above signature are set on tested spherical optics element;
Second step: computer control and data handling system drive the driver control electronic control translation stage in radius-of-curvature position that optical axis direction moves tested spherical optics element reference surface in the standard lens, utilize sextuple adjustment rack to adjust the position of tested spherical optics element, detect in order to realization " opal " position zero, and " opal " position measurement is somebody's turn to do in preservation;
The 3rd step: computer control and data handling system drive the driver control electronic control translation stage and move tested spherical optics element to the confocal position place at optical axis direction; The confocal position that tested spherical optics element is a concave spherical surface is the radius-of-curvature sum of reference surface and tested spherical optics element, and the confocal position that tested spherical optics element is protruding sphere is radius-of-curvature poor of reference surface and tested spherical optics element; The position that utilizes sextuple adjustment rack to adjust tested spherical optics element is detected to realize this confocal position zero, and preserves this confocal position measurement data; By computer control and data handling system a plurality of signatures in the measurement data are carried out geometric center position and form parameter analytical calculation;
The 4th step:, detect the line position adjustment of going forward side by side of tested spherical optics element Rotate 180/N degree by the precise rotating platform in the sextuple adjustment rack, preserve this confocal position measurement data to realize this confocal position zero; Computer control and data handling system are carried out geometric center position and form parameter analytical calculation to a plurality of signatures in this measurement data, determine with the 3rd step in the relative rotation angle error determined of a plurality of signatures whether satisfy the error margin requirement; If satisfy the error margin requirement, then carried out for the 5th step; If do not satisfy, then repeated for the 4th step until reaching requirement;
The 5th step: continue tested spherical optics element by same direction Rotate 180/N degree and carry out the precision positions adjustment by precise rotating platform in the sextuple adjustment rack,, preserve this confocal position measurement data to realize zero detection of this confocal position; By computer control and data handling system a plurality of signatures in this measurement data are carried out geometric center position and form parameter analytical calculation, determine with the 4th step in the relative rotation angle error determined of a plurality of signatures whether satisfy the error margin requirement, if do not satisfy and then repeat this step until reaching requirement, if satisfying error margin requires then to continue by same direction Rotate 180/N degree, repeat this step until being that increment comprises in being rotated in first described in the 4th step and rotating 2N-1 time altogether with the 180/N degree, at this moment the measured optical unit present position and initial position angle are 180/N degree or 360-180/N degree;
The 6th step: go on foot the 5th once " opal " position measurement that obtained of step and 2N confocal position measurement data with second and be divided into N and organize, form totally three positions by confocal position behind " opal " position, a certain confocal position of tested spherical optics element and the relative Rotate 180 degree with it for every group, wherein measure by " opal " position measurement, 0 degree confocal position and 180 degree confocal position measurements are formed for the 1st group; Measure by " opal " position measurement, 180/N degree confocal position and the measurement of 180 * (N+1)/N degree confocal position is formed for the 2nd group; The N group is measured by " opal " position measurement, 360 * (N-1)/2N degree confocal position and the measurement of 360 * (2N-1)/2N degree confocal position is formed; Middle each group is analogized according to above-mentioned rule, N=1 wherein, 2,3,4,5 ..., carry out data processing by computer control and data handling system then, in order to isolate the face shape error information that the N that has nothing to do with reference surface organizes tested spherical optics element;
The 7th step: the tested spherical optics component side shape error information of the N group being calculated by three position methods by computer control and data handling system rotates to same direction, utilize the method for average to carry out the data average treatment, obtain tested more accurately spherical optics element face shape error, realize the sphere absolute measurement.
The present invention's advantage compared with prior art is:
(1) adopt once " opal " position measurement and 2N confocal position to measure in the method for the present invention, three more traditional positions or five position methods have bigger extensibility and adaptability.
(2) adopt combination N to organize three position method result of calculations in the method for the present invention, the average result that rotates to after the same direction has higher accuracy.
(3) adopt many characteristic matching to be rotated angle control in the method for the present invention, simple to operate and anglec of rotation precision is higher.
(4) the present invention avoids using complicated octuple precision adjustment unit, the trouble adjusted of light path repeatedly in the time of can avoiding repeatedly confocal position to measure simultaneously.
In sum, the accuracy of relative rotation angle avoided using complicated precision adjustment unit and loaded down with trivial details light path adjustment process when the present invention can guarantee that by many characteristic matching a plurality of confocal position are measured.The method of average is used to make up N and organizes three position method result of calculations to improve tested spherical optics element absolute measurement result's accuracy.The present invention in practical operation convenience and absolute measurement result's accuracy between kept balance preferably.
Description of drawings
Fig. 1 is the concave spherical surface measuring system synoptic diagram that the inventive method adopted;
Fig. 2 is the protruding sphere measuring system synoptic diagram that the inventive method adopted;
Fig. 3 is the structural drawing of sextuple adjustment rack of the present invention;
Fig. 4 a to Fig. 4 e is five position method (N=2) measurement results among the present invention and feature identification and some coupling synoptic diagram;
Fig. 5 a to Fig. 5 d is identification of the atypical characteristic among the present invention and zone coupling synoptic diagram;
Fig. 6 a to Fig. 6 b measures typical interferogram for " opal " position measurement among the present invention and confocal position;
Fig. 7 is five position method (N=2) synoptic diagram among the present invention;
Fig. 8 is detection and flow chart of data processing figure among the present invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Fig. 1 is the concave spherical surface measuring system synoptic diagram that the inventive method adopted, and Fig. 2 is the protruding sphere measuring system synoptic diagram that the inventive method adopted.This method can be used in the horizontal and vertical interferometer measuration system.It is identical with the absolute measuring system structure that protruding sphere detects that the present invention is used for concave spherical surface, and just its tested spherical optics element bore is different with the range of curvature radius existence, by standard lens bore and relative aperture decision.The present invention is by measuring and 2N (N=1,2,3,4 " opal " location conflicts ...) individual confocal position interferometry result carries out data processing and directly obtain and the irrelevant tested spherical optics component side shape control information of reference surface error.Being three traditional position methods when N=1, is five position methods when N=2.A plurality of characteristic matching will be carried out anglec of rotation control accurately and Data Matching according to the character shape that a plurality of signatures that are arranged on tested spherical optics element surface form in the confocal position measurement data, the method of average be used for combination repeatedly by " opal " position measurement, tested spherical optics element 4 a certain confocal position measure with relative Rotate 180 degree after the absolute sphere measuring method of three position methods formed of confocal position measurement, with the accuracy of raising sphere absolute method of measurement.
As depicted in figs. 1 and 2, the system and device of the inventive method employing is made up of Feisuo type phase shifting interferometer 1, standard lens 2, tested spherical optics element 4, sextuple adjustment rack 5, electronic control translation stage 6, driver 7 and computer control and data handling system 8.Computer control and data handling system 8 move at Feisuo type phase shifting interferometer 1 optical axis direction through driver 7 control electronic control translation stages 6.As shown in Figure 3, the sextuple adjustment rack 5 among the present invention is by self centering mirror holder 51, form around optical axis center 360 degree revolving-turrets 52, two-dimentional tilt adjustments frame 53 and D translation platform 54.Be installed in self centering mirror holder 51 on the revolving-turret the measured optical unit 4 that is used to be installed, revolving-turret 52 back are respectively with two-dimentional tilt adjustments frame 53 of inferior installation and D translation platform 53.Sextuple adjustment rack 5 can automatically controlled or manual adjustment.Revolving-turret 52 resolution are more than 0.01 degree, and bearing accuracy is more than 0.1 degree; D translation platform 54 precision are micron order.
Fig. 8 detection step of the present invention is shown and data processing method as follows:
The first step: with Feisuo type phase shifting interferometer 1, standard lens 2, tested spherical optics element 4, sextuple adjustment rack 5, electronic control translation stage 6, driver 7 and computer control and data handling system 8 by Fig. 1 or installation shown in Figure 2 with connect.Installation code camera lens 2, tested spherical optics element 4, sextuple adjustment rack 5 in regular turn on the optical axis of Feisuo type phase shifting interferometer 1, tested spherical optics element 4, sextuple adjustment rack 5 place on the electronic control translation stage 6, electronic control translation stage 6 is connected with computer control and data handling system 8 respectively with driver 7, and Feisuo type phase shifting interferometer 1 is connected with computer control and data handling system 8; Three and above signature are set on tested spherical optics element 4; On tested spherical optics element 4 a plurality of signatures are set, this signature can be a symmetrical circular, also can be irregularly shaped arbitrarily, and this signature will make that corresponding data is lost among the interferometry result.The coupling of a plurality of features is that the feature that is formed in the confocal position measurement data according to a plurality of signatures that are arranged on tested spherical optics element 4 surfaces by computer control and data handling system 8 is carried out geometric center position and form parameter calculating, and then relative rotation angle between a plurality of confocal position measurements is controlled; Common three signatures can be determined relative rotation angle between a plurality of confocal position measurements, or more signature helps improving anglec of rotation precision, but can lose more effectively measurement data, in practical operation, require to select foundation as the signature quantity optimization to satisfy error margin.Fig. 4 a be in the five position methods (N=2) tested spherical optics element 4 at " opal " position measurements synoptic diagram, Fig. 4 b-Fig. 4 e is that tested spherical optics element 4 wherein adopts 3 circular marks as benchmark at 0 degree, 90 degree, 180 degree and 270 degree confocal position measurement result synoptic diagram in the five position methods (N=2).Fig. 5 a-Fig. 5 b is for adopting the confocal position measurement result synoptic diagram of a plurality of irregularly shaped marks as benchmark, and the anglec of rotation is 180 degree between them.
Second step: by computer control and data handling system 8 through drivers 7 preliminary control electronic control translation stages 6 in the radius-of-curvature position that optical axis direction moves tested spherical optics element 4 reference surface 3 in the standard lens 2, " opal " position is shown in dotted line position among Fig. 1 and Fig. 2.Then by sextuple adjustment rack 5 accurate adjustment, tested spherical optics element 4 is adjusted to the position at dotted line place, realizing and should " opal " position zero detect, its typical interferogram is shown in Fig. 6 a, and preserve should " opal " position measurement W
C(x, y).
The 3rd step: move tested spherical optics element 4 to the confocal position place through driver 7 preliminary control electronic control translation stages 6 at optical axis direction by computer control and data handling system 8; Tested spherical optics element 4 is the radius-of-curvature sum of reference surface 3 and tested spherical optics element 4 for the confocal position of concave spherical surface, and tested spherical optics element 4 is radius-of-curvature poor of reference surface 3 and tested spherical optics element 4 for the confocal position of protruding sphere; Confocal position is shown in tested spherical optics element 4 solid line positions among Fig. 1 and Fig. 2.Detect to realize this confocal position zero by sextuple adjustment rack 5 accurate tested spherical optics element 4 positions of adjusting, its typical interferogram and is preserved this confocal position measurement data W shown in Fig. 6 b
0(x, y).Carry out geometric center position and form parameter analytical calculation by a plurality of signatures in computer control and 8 pairs of measurement data of data handling system.Identified the geometric center of circular mark among Fig. 4 b-Fig. 4 e.
The 4th step:, detect with tested spherical optics element 4 Rotate 180s/N degree and carry out the precision positions adjustment by precise rotating platform 52 in the sextuple adjustment rack 5, preserve this confocal position measurement data W to realize this confocal position zero
(180/N)(x, y).Carry out geometric center position and form parameter analytical calculation by a plurality of signatures in computer control and 8 pairs of these measurement data of data handling system, determine with the 3rd step in the relative rotation angle error determined of a plurality of signatures whether satisfy the error margin requirement.Shown in Fig. 4 e, the feature that is symmetrically distributed in many characteristic matching is fit to adopt the geometric center location matches as Fig. 4 b-; Shown in Fig. 5 a-Fig. 5 b, atypical characteristic is fit to adopt regional matching process.Satisfy the error margin requirement, then carried out for the 5th step,, then adjust the measured optical unit position, repeat this step until reaching requirement by sextuple adjustment rack if do not satisfy.
There are translation, rotation and no-load voltage ratio transformation relation between two groups of corresponding reference points, can be expressed as follows:
Wherein, x, y are the initial characteristics point coordinate, and x ', y ' they are unique point coordinate after the anglec of rotation, and M is that feature is counted, m=1, and 2,3 ... m ... M; x
0, y
0Be rotation center, be generally the measurement data centre coordinate; Dx and dy are respectively x and y direction translational movement, and θ is the anglec of rotation; S
x, S
yBe respectively the x and the y direction no-load voltage ratio factor.With Fig. 4 b-Fig. 4 e is example, the feature M=3 that counts here, and Fig. 4 b is measured W as a result of the 3rd step
0(x, y), its character pair geometric center point coordinate is (x
1, y
1), (x
2, y
2) and (x
3, y
3).Fig. 4 c goes on foot described measurement result W for this
(180/2)(x, y), its character pair geometric center point coordinate be (x '
1, y '
1), (x '
2, y '
2) and (x '
3, y '
3).The variation relation parameter can be tried to achieve by (1) formula between the correspondence.Judge then whether anglec of rotation error satisfies the error margin requirement.
The form parameter analytical approach can adopt boundary extraction algorithm ripe in the digital image processing techniques, carries out the shape area coupling then, in order to calculate relative rotation angle.Fig. 5 c and Fig. 5 d are that Fig. 5 a and Fig. 5 b character pair shape are extracted figure.Carry out the zone coupling according to the character shape that is extracted, but method for registering images in the concrete grammar reference digital image treatment technology.
The 5th step: continue tested spherical optics element 4 by same direction Rotate 180/N degree and carry out the precision positions adjustment by precise rotating platform 52 in the sextuple adjustment rack 5,, preserve this confocal position measurement data W to realize zero measurement of this confocal position
2 (180/N)(x, y).Carry out geometric center position and form parameter analytical calculation by a plurality of signatures in computer control and 8 pairs of these measurement data of data handling system, determine with the 4th step in the relative rotation angle error determined of a plurality of signatures whether satisfy the error margin requirement, then do not repeat this step until reaching requirement if do not satisfy.If satisfying error margin requires then to continue by same direction Rotate 180/N degree, repeat this step until being that increment comprises in being rotated in first described in the 4th step and rotating 2N-1 time altogether with the 180/N degree, at this moment the measured optical unit 4 present positions and initial position angle are 180/N degree or 360-180/N degree.
The 6th step: go on foot the 5th once " opal " position measurement that obtained of step and 2N confocal position measurement data with second and be divided into N and organize, form totally three positions by confocal position behind " opal " position, tested spherical optics element 4 a certain confocal position and the relative Rotate 180 degree with it for every group, wherein measure by " opal " position measurement, 0 degree confocal position and 180 degree confocal position measurements are formed for the 1st group; Measure by " opal " position measurement, 180/N degree confocal position and the measurement of 180 * (N+1)/N degree confocal position is formed for the 2nd group; The N group is measured by " opal " position measurement, 360 * (N-1)/2N degree confocal position and the measurement of 360 * (2N-1)/2N degree confocal position is formed; Middle each group is analogized according to above-mentioned rule, N=1 wherein, 2,3,4,5 ..., carry out data processing by computer control and data handling system 8 then, in order to isolate the face shape error information that the N that has nothing to do with reference surface 3 organizes tested spherical optics element 4;
Go on foot once " opal " position measurement W that the 5th step was obtained to above-mentioned second
C(x is y) with 2N confocal position measurement result W
0(x, y), W
(180/N)(x, y), W
2 (180/N)(x, y) ..., W
(2N-1) (180/N)(x y) carries out data processing by computer control and data handling system 8 and isolates the tested aspherical optical element 4 face shape error information that have nothing to do with reference surface 3, realizes absolute measurement.For convenience of description, here at first with rectangular coordinate (x, y) be converted to polar coordinates (above-mentioned 2N+1 measurement result is expressed as follows respectively for r, θ) form:
W
0(r，θ)＝W
R(r，θ)+W
I(r，θ)+T(r，θ)， (3)
W
180/N(r，θ)＝W
R(r，θ)+W
I(r，θ)+T(r，θ+180/N)， (4)
W
2(180/N)(r，θ)＝W
R(r，θ)+W
I(r，θ)+T(r，θ+2×(180/N))，(5)
……
W
(2N-1)(180/N)(r，θ)＝W
R(r，θ)+W
I(r，θ)+T(r，θ+(2N-1)×(180/N))，(6)
Wherein, W
C(r, θ), W
0(r, θ), W
180/N(r, θ), W
2 (108/N)(r, θ), W
(2N-1) (180/N)(r, θ) expression " opal " position, 0 degree confocal position, 180/N degree confocal measurement, 2 (180/N) degree confocal measurement and (2N-1) (180/N) degree confocal measurement data respectively, W
R(r θ) is reference surface 3 face shape errors in the standard lens 2, W
I(r θ) is the face shape error that Feisuo type phase shifting interferometer internal focus optical system is introduced, T (r, θ) the tested spherical optics element 4 absolute face shape errors of expression.
The 7th step: the tested spherical optics element 4 face shape error data of the N group being calculated by three position methods by computer control and data handling system 8 rotate to same direction, utilize the method for average to carry out the data average treatment, obtain tested more accurately spherical optics element face shape error, realize the sphere absolute measurement.According to three position method algorithms, based on above-mentioned equation (2), equation (3) with respect to equation (3) Rotate 180 degree measurement result W
180(r, θ), first group of three position method result of calculation can by following formula try to achieve tested spherical optics element 4 absolute face shape error T (r, θ) following expression:
In like manner, based on above-mentioned equation (2), (4) with respect to (4) Rotate 180 degree measurement result W
180+180/N(r, θ), second group of three position method result of calculation can be tried to achieve absolute face shape error T behind tested spherical optics element 4 Rotate 180s/N degree by following formula
180/N(r, θ) following expression:
N organizes three position method result of calculations can try to achieve absolute face shape error after 4 rotations (2N-1) of tested spherical optics element (180/N)-180 are spent by following formula:
The method of average is used for making up the absolute sphere measuring method of repeatedly being made up of confocal position measurement behind " opal " position measurement, 4 certain the angle confocal position measurement of tested spherical optics element and the relative Rotate 180 degree of three position methods, to improve the accuracy of sphere absolute method of measurement.Above-mentioned N tested spherical optics element 4 absolute face shape errors are rotated to 0 degree direction, and carry out average treatment:
Wherein
Be the absolute face shape error average result of tested spherical optics 4, T '
N/180(r, θ) and T '
(2N-1) (180/N)-180(r, the result when θ) representing respectively that the 2nd group and N organize three position method result of calculations and rotate to initial 0 degree sense of rotation.Fig. 7 is five position method (N=2) synoptic diagram among the present invention, and 41,42,43,44 are respectively 0 degree, 90 degree, 180 degree and the 270 degree confocal measurement position views of tested spherical optics element 4, total " opal " position W here
C(r, θ), 0 degree confocal position W
0(r, θ), 90 degree confocal position W
90(r, θ), 180 degree confocal position W
180(r is θ) with 270 degree confocal position W
270(r, θ) measurement result, wherein first group of data W
C(r, θ), W
0(r, θ) and W
180(r θ) can calculate tested spherical optics element 4 face shape errors, second group of data W by three position algorithms
C(r, θ), W
90(r, θ) and W
270(r, θ) can calculate tested spherical optics element 4 face shape errors by three position algorithms, calculate tested spherical optics element 4 face shape errors with second group by three position algorithms and revolve to turn 90 degrees and have same sense of rotation, average then and can obtain more reliable absolute face shape error with first group of tested spherical optics element 4 face shape error.Work as N=3,4,5 ..., data processing method similarly.
The non-elaborated part of the present invention belongs to techniques well known.
The above; only be the embodiment among the present invention, but protection scope of the present invention is not limited thereto, anyly is familiar with the people of this technology in the disclosed technical scope of the present invention; conversion or the replacement expected can be understood, all of the present invention comprising within the scope should be encompassed in.
Claims (5)
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