CN101852840A - A kind of optical fiber FAPP magnetic field sensor and preparation method thereof - Google Patents

A kind of optical fiber FAPP magnetic field sensor and preparation method thereof Download PDF

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CN101852840A
CN101852840A CN 201010194583 CN201010194583A CN101852840A CN 101852840 A CN101852840 A CN 101852840A CN 201010194583 CN201010194583 CN 201010194583 CN 201010194583 A CN201010194583 A CN 201010194583A CN 101852840 A CN101852840 A CN 101852840A
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optical fiber
magnetic field
diaphragm
cavity
field sensor
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冉曾令
饶云江
鲁恩
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University of Electronic Science and Technology of China
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Abstract

The invention discloses an optical fiber Fabry-Perot magnetic field sensor, which comprises optical fiber and is characterized in that a Fabry-Perot cavity which uses gas or air as medium is arranged on one end surface of the optical fiber, the Fabry-Perot cavity comprises two reflecting surfaces, one reflecting surface is the end surface of the optical fiber, the other reflecting surface is a diaphragm corresponding to the end surface of the optical fiber, the diaphragm is plated or stuck with magnetic material or metal material, when the diaphragm gets close to a magnetic field, magnetic force drives the diaphragm to move to change the length of the Fabry-Perot cavity, and the optical fiber picks up the reflective optical signal of the Fabry-Perot cavity to obtain the length information of the length of the Fabry-Perot cavity to realize the measurement of the magnetic field. The invention has the advantages that the sensor overcomes the defects of the prior art, the long-term, stable and accurate measurement of the magnetic field can be realized, the sensitivity is high and the preparation method is simple.

Description

一种光纤珐珀磁场传感器及其制备方法 A kind of optical fiber FAPP magnetic field sensor and preparation method thereof

技术领域technical field

本发明涉及光纤传感技术领域,具体涉及一种光纤珐珀磁场传感器及其制备方法。The invention relates to the technical field of optical fiber sensing, in particular to an optical fiber FAPO magnetic field sensor and a preparation method thereof.

背景技术Background technique

磁场测量是电磁测量技术的一个重要分支。在工业生产和科学研究的许多领域都要涉及到磁场测量问题。如:电流测量、磁探矿、磁悬浮列车、地质勘探、同位素分离、质谱仪、电子束和离子束加工装置、受控热核反应,以及人造地球卫星等,甚至在医学和生物学方面也有应用。例如,磁场疗法治病,用“心磁图”、“脑磁图”来诊断疾病,环境磁场对生物和人体的作用,以及磁现象与生命现象的研究等都需要磁场测量技术和测磁仪器的研制,因此,磁场的测量技术与人们的生活密切相关。Magnetic field measurement is an important branch of electromagnetic measurement technology. Magnetic field measurement is involved in many fields of industrial production and scientific research. Such as: current measurement, magnetic prospecting, maglev train, geological exploration, isotope separation, mass spectrometer, electron beam and ion beam processing device, controlled thermonuclear reaction, and artificial earth satellite, etc., and even has applications in medicine and biology. For example, magnetic field therapy to treat diseases, use "magnetocardiogram" and "magnetoencephalogram" to diagnose diseases, the effect of environmental magnetic field on organisms and human body, and the research of magnetic phenomena and life phenomena all require magnetic field measurement technology and magnetic measuring instruments Therefore, the measurement technology of magnetic field is closely related to people's life.

传统的磁场传感器是以电测试原理为主,如霍尔效应和电磁感应原理,已经有成熟产品。但作为电测原理的传感器往往易受电磁干扰、容易磁饱和等,因而光学式的磁场传感器越来越受到关注。现有的光学磁场传感器主要是基于法拉第旋转效应或者是磁-机-光转换原理,存在长期稳定性差、测量精度不高等缺点。Traditional magnetic field sensors are mainly based on electrical testing principles, such as Hall effect and electromagnetic induction principles, and mature products have already been produced. However, sensors based on the principle of electric measurement are often susceptible to electromagnetic interference and magnetic saturation, so optical magnetic field sensors are attracting more and more attention. The existing optical magnetic field sensors are mainly based on the Faraday rotation effect or the principle of magneto-mechanical-optical conversion, which have disadvantages such as poor long-term stability and low measurement accuracy.

发明内容Contents of the invention

本发明所要解决的问题是:如何提供一种光纤珐珀磁场传感器及其制备方法,该传感器能克服现有技术的缺陷,能实现长期稳定、准确的测量磁场,而且灵敏度高,制备方法简单。The problem to be solved by the present invention is: how to provide an optical fiber FAPO magnetic field sensor and its preparation method, the sensor can overcome the defects of the prior art, can realize long-term stable and accurate magnetic field measurement, and has high sensitivity and simple preparation method.

本发明所提出的技术问题是这样解决的:提供一种光纤珐珀磁场传感器,包括光纤,其特征在于,在光纤的一端面设置一个以气体或者空气为介质的珐珀腔,所述珐珀腔包括两个反射面,一个反射面为光纤的端面,另一反射面是与光纤端面相对应的膜片,所述膜片镀有或者粘贴有磁材料或者金属材料,靠近磁场时,磁力带动膜片运动而改变所述珐珀腔的腔长,所述光纤拾取珐珀腔的反射光学信号获取珐珀腔腔长信息,实现对磁场的测量。The technical problem proposed by the present invention is solved in the following way: provide a kind of optical fiber enamel magnetic field sensor, comprise optical fiber, it is characterized in that, a enamel cavity with gas or air as medium is set on one end face of optical fiber, said enamel The cavity includes two reflective surfaces, one reflective surface is the end face of the optical fiber, and the other reflective surface is a diaphragm corresponding to the end face of the optical fiber. The diaphragm is coated or pasted with magnetic materials or metal materials. The diaphragm moves to change the cavity length of the FAPO cavity, and the optical fiber picks up the reflected optical signal of the FAPO cavity to obtain the cavity length information of the FAPO cavity to realize the measurement of the magnetic field.

按照本发明所提供的光纤珐珀磁场传感器,其特征在于,所述珐珀腔的横截面大于、等于或者小于光纤的纤芯的横截面。According to the optical fiber FAPO magnetic field sensor provided by the present invention, it is characterized in that the cross section of the FAPO cavity is greater than, equal to or smaller than the cross section of the fiber core of the optical fiber.

按照本发明所提供的光纤珐珀磁场传感器,其特征在于,所述珐珀腔是由设置在光纤端面内部正中心的圆柱形微槽和对接在光纤端面的膜片构成。According to the fiber optic FAPO magnetic field sensor provided by the present invention, the FAPO cavity is composed of a cylindrical microgroove arranged in the center of the fiber end face and a diaphragm butted on the fiber end face.

按照本发明所提供的光纤珐珀磁场传感器,其特征在于,所述珐珀腔是由光纤的端面、套设在光纤上的套管和设置在套管另一端的膜片构成。According to the optical fiber FAP magnetic field sensor provided by the present invention, the FAP cavity is composed of the end face of the optical fiber, a sleeve sleeved on the optical fiber and a diaphragm arranged at the other end of the sleeve.

按照本发明所提供的光纤珐珀磁场传感器,其特征在于,所述光纤是采用石英、聚合物、宝石或光子晶体材料制成的单模光纤。According to the optical fiber FAP magnetic field sensor provided by the present invention, it is characterized in that the optical fiber is a single-mode optical fiber made of quartz, polymer, gemstone or photonic crystal material.

一种光纤珐珀磁场传感器的制备方法,其特征在于,包括以下步骤:A kind of preparation method of optical fiber enamel magnetic field sensor, it is characterized in that, comprises the following steps:

①在光纤的端面上用157nm激光器加工出一个圆柱形微槽,深度10μm至10mm之间;①Use a 157nm laser to process a cylindrical microgroove on the end face of the optical fiber, with a depth between 10μm and 10mm;

②在圆柱形微槽外对接上同种材料的膜片,形成珐珀腔;② Butt a diaphragm of the same material on the outside of the cylindrical microgroove to form a enamel cavity;

③在膜片上镀上磁性材料或金属材料,制成了光纤法珀磁场传感器。③The magnetic material or metal material is plated on the diaphragm to make a fiber-optic F-P magnetic field sensor.

一种光纤珐珀磁场传感器的制备方法,其特征在于,包括以下步骤:A kind of preparation method of optical fiber enamel magnetic field sensor, it is characterized in that, comprises the following steps:

①将套管两端切平,所述套管内圆能套设光纤;① Cut the two ends of the sleeve flat, and the inner circle of the sleeve can be used to sleeve the optical fiber;

②在套管的一端对接上和套管同种材料的膜片;② Butt a diaphragm of the same material as the casing at one end of the casing;

③在膜片表面镀上磁性材料或金属材料,将光纤插入套管中,并和膜片保持微小的距离,用胶水固定,制成了光纤法珀磁场传感器。③ Coat the surface of the diaphragm with magnetic material or metal material, insert the optical fiber into the sleeve, and keep a small distance from the diaphragm, and fix it with glue to make a fiber optic F-P magnetic field sensor.

本发明的工作原理是:设置一个以气体或者空气为介质包含两个光学反射面构成的珐珀腔,珐珀腔的一端为一膜片,在膜片上镀上或粘贴上磁材料或金属材料,膜片和磁(金属)材料的厚度和FP腔尺寸可调节灵敏度。靠近磁场,磁(金属)材料的磁场与垂直于膜片的磁场产生磁力作用,磁力带动膜片运动从而改变FP腔腔长,用光纤拾取FP腔的反射光学信号获得腔长信息,便可实现对磁场的测量。The working principle of the present invention is: to set a FAPO chamber with gas or air as the medium and including two optical reflection surfaces, one end of the FAPO chamber is a diaphragm, and the magnetic material or metal is plated or pasted on the diaphragm. Material, diaphragm and magnetic (metallic) material thickness and FP cavity size are adjustable for sensitivity. Close to the magnetic field, the magnetic field of the magnetic (metal) material and the magnetic field perpendicular to the diaphragm produce a magnetic force, and the magnetic force drives the diaphragm to move to change the length of the FP cavity. The optical fiber is used to pick up the reflected optical signal of the FP cavity to obtain the cavity length information, which can be realized. Measurement of magnetic fields.

本发明结构简单合理,可以实现长期稳定、准确的测量磁场,而且灵敏度很高,实现方法也很简单。The invention has a simple and reasonable structure, can realize long-term stable and accurate magnetic field measurement, and has high sensitivity, and the realization method is also very simple.

附图说明Description of drawings

图1是本发明第一种实施例的结构示意图;Fig. 1 is the structural representation of first kind of embodiment of the present invention;

图2a是本发明第二种实施例的结构示意图,其中图2b是图2a的右侧端面示意图;Fig. 2a is a schematic structural view of the second embodiment of the present invention, wherein Fig. 2b is a schematic view of the right end face of Fig. 2a;

图3是本发明第三种实施例的结构示意图;Fig. 3 is the structural representation of the third embodiment of the present invention;

图4a是本发明第四种实施例的结构示意图,其中图4b是图4a的右侧端面示意图。Fig. 4a is a schematic structural diagram of a fourth embodiment of the present invention, wherein Fig. 4b is a schematic diagram of the right side end of Fig. 4a.

其中,1、光纤,2、膜片,3、珐珀腔,4、磁性材料层,5、套管,6、胶水层,7、金属层。Among them, 1. Optical fiber, 2. Diaphragm, 3. Fabric cavity, 4. Magnetic material layer, 5. Sleeve, 6. Glue layer, 7. Metal layer.

具体实施方式Detailed ways

下面结合附图对本发明作进一步描述:The present invention will be further described below in conjunction with accompanying drawing:

如图1~4所示,该光纤珐珀磁场传感器,包括光纤1,在光纤1的一端面设置一个以气体或者空气为介质的珐珀腔3,珐珀腔3包括两个反射面,一个反射面为光纤的端面,另一反射面是与光纤端面相对应的膜片2,膜片2镀有或者粘贴有磁材料层4或者金属层7,靠近磁场时,磁力带动膜片运动而改变所述珐珀腔的腔长,所述光纤拾取珐珀腔的反射光学信号获取珐珀腔腔长信息,实现对磁场的测量。As shown in Figures 1 to 4, the optical fiber FAPP magnetic field sensor includes an optical fiber 1, and a FAPO cavity 3 with gas or air as a medium is arranged on one end of the fiber 1. The FAPO cavity 3 includes two reflecting surfaces, one The reflective surface is the end face of the optical fiber, and the other reflective surface is the diaphragm 2 corresponding to the end face of the optical fiber. The diaphragm 2 is coated or pasted with a magnetic material layer 4 or a metal layer 7. When it is close to the magnetic field, the magnetic force drives the diaphragm to move and change The cavity length of the FAPO cavity, the optical fiber picks up the reflected optical signal of the FAPO cavity to obtain the cavity length information of the FAPO cavity, and realizes the measurement of the magnetic field.

本发明的的光纤1是采用石英、聚合物、宝石或光子晶体材料制成的单模光纤,本发明所述的加工是采用157nm激光加工、飞秒激光加工、红外激光加工或电子束刻蚀,本发明所述对接是采用激光熔接、电弧熔接、或粘接,本发明所述切割是采用激光、切割刀或研磨方法切掉。本发明的光纤由包层和纤芯构成,所述珐珀腔的横截面可大于、等于或小于光纤的纤芯的横截面。The optical fiber 1 of the present invention is a single-mode optical fiber made of quartz, polymer, gem or photonic crystal material, and the processing described in the present invention is to use 157nm laser processing, femtosecond laser processing, infrared laser processing or electron beam etching , the butt joint of the present invention adopts laser welding, arc welding, or bonding, and the cutting of the present invention adopts laser, cutting knife or grinding method to cut off. The optical fiber of the present invention is composed of a cladding and a core, and the cross section of the FPP cavity may be greater than, equal to or smaller than that of the core of the optical fiber.

实施例1Example 1

包括光纤1,在光纤1的一端面设置圆柱形微槽,深度在10μm至10mm之间,在圆柱形微槽外对接与光纤端面相对应的膜片2,形成珐珀腔3,膜片2镀有或者粘贴有磁材料或者金属材料层。制备方法是:①在光纤的端面上用157nm激光器加工出一个圆柱形微槽,深度10μm至10mm之间;②在圆柱形微槽外对接上同种材料的膜片,形成珐珀腔;③在膜片上镀上磁性材料4或金属材料7,制成了光纤法珀磁场传感器。Including the optical fiber 1, a cylindrical microgroove is set on one end of the optical fiber 1, and the depth is between 10 μm and 10 mm, and the membrane 2 corresponding to the end surface of the optical fiber is connected outside the cylindrical microgroove to form a enamel cavity 3, and the membrane 2 A magnetic material or a metal material layer is plated or pasted. The preparation method is: ① use a 157nm laser to process a cylindrical microgroove on the end face of the optical fiber, with a depth between 10 μm and 10 mm; ② connect a diaphragm of the same material to the outside of the cylindrical microgroove to form a enamel cavity; ③ The magnetic material 4 or the metal material 7 is plated on the diaphragm to form an optical fiber Fappaut magnetic field sensor.

实施例2Example 2

包括光纤1,在光纤1的一端面设置一个以气体或者空气为介质的珐珀腔3,珐珀腔3是由光纤1的端面、套设在光纤1上的套管5和设置在套管5另一端的膜片2构成,膜片2镀有或者粘贴有磁材料或者金属材料层。制备方法是:①将套管5两端切平,套管5内圆能套设光纤1;②在套管5的一端对接上和套管5同种材料的膜片2;③在膜片2表面镀上磁材料4或者金属材料层7,将光纤1插入套管5中,并和膜片2保持微小的距离,用胶水层6固定,制成了光纤法珀磁场传感器。Including the optical fiber 1, a enamel chamber 3 with gas or air as the medium is arranged on one end face of the optical fiber 1. 5 The diaphragm 2 at the other end is formed, and the diaphragm 2 is plated or pasted with a magnetic material or a metal material layer. The preparation method is as follows: ① cut the two ends of the sleeve 5 flat, and the inner circle of the sleeve 5 can be sleeved with the optical fiber 1; ② connect one end of the sleeve 5 with a diaphragm 2 of the same material as the sleeve 5; 2. Coat the surface with magnetic material 4 or metal material layer 7, insert the optical fiber 1 into the sleeve 5, and keep a small distance from the diaphragm 2, and fix it with a glue layer 6 to make an optical fiber Perot magnetic field sensor.

Claims (7)

1.一种光纤珐珀磁场传感器,包括光纤,其特征在于,在光纤的一端面设置一个以气体或者空气为介质的珐珀腔,所述珐珀腔包括两个反射面,一个反射面为光纤的端面,另一反射面是与光纤端面相对应的膜片,所述膜片镀有或者粘贴有磁材料或者金属材料,靠近磁场时,磁力带动膜片运动而改变所述珐珀腔的腔长,所述光纤拾取珐珀腔的反射光学信号获取珐珀腔腔长信息,实现对磁场的测量。1. An optical fiber enamel magnetic field sensor, comprising an optical fiber, is characterized in that an end face of the optical fiber is provided with a enamel cavity with gas or air as a medium, and the enamel cavity includes two reflective surfaces, and a reflective surface is The end face of the optical fiber, and the other reflective surface is a diaphragm corresponding to the end face of the optical fiber. The diaphragm is coated or pasted with magnetic materials or metal materials. When it is close to the magnetic field, the magnetic force drives the diaphragm to move to change the Cavity length, the optical fiber picks up the reflected optical signal of the FAPO cavity to obtain the cavity length information of the FAPO cavity, and realizes the measurement of the magnetic field. 2.根据权利要求1所述的光纤珐珀磁场传感器,其特征在于,所述珐珀腔的横截面大于、等于或者小于光纤的纤芯的横截面。2 . The fiber optic FAP magnetic field sensor according to claim 1 , wherein the cross section of the FAP cavity is greater than, equal to or smaller than the cross section of the fiber core of the optical fiber. 3 . 3.根据权利要求2所述的光纤珐珀磁场传感器,其特征在于,所述珐珀腔是由设置在光纤端面内部正中心的圆柱形微槽和对接在光纤端面的膜片构成。3. The fiber optic FAP magnetic field sensor according to claim 2, wherein the FAP cavity is composed of a cylindrical microgroove arranged in the center of the fiber end face and a diaphragm connected to the fiber end face. 4.根据权利要求2所述的光纤珐珀磁场传感器,其特征在于,所述珐珀腔是由光纤的端面、套设在光纤上的套管和设置在套管另一端的膜片构成。4. The fiber optic FAP magnetic field sensor according to claim 2, characterized in that, the FAP cavity is composed of the end face of the optical fiber, a sleeve sleeved on the optical fiber and a diaphragm arranged at the other end of the sleeve. 5.根据权利要求1~4任一所述的光纤珐珀磁场传感器,其特征在于,所述光纤是采用石英、聚合物、宝石或光子晶体材料制成的单模光纤。5 . The optical fiber FAP magnetic field sensor according to any one of claims 1 to 4 , wherein the optical fiber is a single-mode optical fiber made of quartz, polymer, gem or photonic crystal material. 6.根据权利要求3所述的光纤珐珀磁场传感器的制备方法,其特征在于,包括以下步骤:6. the preparation method of optical fiber enamel magnetic field sensor according to claim 3, is characterized in that, comprises the following steps: ①在光纤的端面上用157nm激光器加工出一个圆柱形微槽,深度10μm至10mm之间;①Use a 157nm laser to process a cylindrical microgroove on the end face of the optical fiber, with a depth between 10μm and 10mm; ②在圆柱形微槽外对接上同种材料的膜片,形成珐珀腔;② Butt a diaphragm of the same material on the outside of the cylindrical microgroove to form a enamel cavity; ③在膜片上镀上磁性材料或金属材料,制成了光纤法珀磁场传感器。③The magnetic material or metal material is plated on the diaphragm to make a fiber-optic F-P magnetic field sensor. 7.根据权利要求4所述的光纤珐珀磁场传感器的制备方法,其特征在于,包括以下步骤:7. the preparation method of optical fiber enamel magnetic field sensor according to claim 4, is characterized in that, comprises the following steps: ①将套管两端切平,所述套管内圆能套设光纤;① Cut the two ends of the sleeve flat, and the inner circle of the sleeve can be used to sleeve the optical fiber; ②在套管的一端对接上和套管同种材料的膜片;② Butt a diaphragm of the same material as the casing at one end of the casing; ③在膜片表面镀上磁性材料或金属材料,将光纤插入套管中,并和膜片保持微小的距离,用胶水固定,制成了光纤法珀磁场传感器。③ Coat the surface of the diaphragm with magnetic material or metal material, insert the optical fiber into the sleeve, and keep a small distance from the diaphragm, and fix it with glue to make a fiber optic F-P magnetic field sensor.
CN 201010194583 2010-06-08 2010-06-08 A kind of optical fiber FAPP magnetic field sensor and preparation method thereof Pending CN101852840A (en)

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CN102621104A (en) * 2012-03-15 2012-08-01 电子科技大学 Graphene film sensitized D-shaped optical fiber surface plasmon resonance (SPR) sensor and preparation method thereof
CN106908092A (en) * 2017-04-12 2017-06-30 北京航空航天大学 A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method
WO2018041718A1 (en) 2016-08-29 2018-03-08 fos4X GmbH Optical magnetic-field sensor
CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
CN110579726A (en) * 2019-10-15 2019-12-17 哈尔滨理工大学 A high-sensitivity magnetic field sensing device based on spr
CN112433102A (en) * 2020-10-15 2021-03-02 西安理工大学 Optical fiber electric field sensor based on F-P interference principle and method thereof
CN112433182A (en) * 2020-10-15 2021-03-02 西安理工大学 Device and method for accurately measuring magnetostriction micro deformation
CN112798289A (en) * 2020-12-21 2021-05-14 中国船舶重工集团公司第七一一研究所 Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof
CN114545301A (en) * 2021-12-27 2022-05-27 西安理工大学 High-precision magnetic field sensor based on optical interference principle and measuring method thereof

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Cited By (10)

* Cited by examiner, † Cited by third party
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CN102621104A (en) * 2012-03-15 2012-08-01 电子科技大学 Graphene film sensitized D-shaped optical fiber surface plasmon resonance (SPR) sensor and preparation method thereof
WO2018041718A1 (en) 2016-08-29 2018-03-08 fos4X GmbH Optical magnetic-field sensor
CN106908092A (en) * 2017-04-12 2017-06-30 北京航空航天大学 A kind of graphene film Fabry-perot optical fiber resonator and its exciting/pick-up detection method
CN109506764A (en) * 2018-12-12 2019-03-22 电子科技大学 A kind of optical fiber MEMS microphone array acoustic detecting plate and system
CN110579726A (en) * 2019-10-15 2019-12-17 哈尔滨理工大学 A high-sensitivity magnetic field sensing device based on spr
CN112433102A (en) * 2020-10-15 2021-03-02 西安理工大学 Optical fiber electric field sensor based on F-P interference principle and method thereof
CN112433182A (en) * 2020-10-15 2021-03-02 西安理工大学 Device and method for accurately measuring magnetostriction micro deformation
CN112798289A (en) * 2020-12-21 2021-05-14 中国船舶重工集团公司第七一一研究所 Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof
CN112798289B (en) * 2020-12-21 2024-02-09 中国船舶集团有限公司第七一一研究所 Sensor for testing in-cylinder pressure of internal combustion engine and manufacturing method thereof
CN114545301A (en) * 2021-12-27 2022-05-27 西安理工大学 High-precision magnetic field sensor based on optical interference principle and measuring method thereof

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Application publication date: 20101006