CN102068252A - Microarray electrode for sampling biological information - Google Patents
Microarray electrode for sampling biological information Download PDFInfo
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- CN102068252A CN102068252A CN2009101726683A CN200910172668A CN102068252A CN 102068252 A CN102068252 A CN 102068252A CN 2009101726683 A CN2009101726683 A CN 2009101726683A CN 200910172668 A CN200910172668 A CN 200910172668A CN 102068252 A CN102068252 A CN 102068252A
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Abstract
本发明公开了一种用于生物信息采样的微阵列电极，包括硅片体，硅片体上设有阵列电极，所述电极为圆锥形针头，针头顶部的直径小于10微米，针头的高度H为350～650微米，圆锥形针头的底面直径L为50～80微米，在针头与硅片体的外表面包覆有金属层；位于硅片体底面上的金属层上设有引出线；所述相邻针头之间的间距M为50～200微米；所述针头内设有针孔，针孔的下端与硅片体相连。本发明解决了电极与皮肤的接触电阻问题，不需要在皮肤上涂抹导电物质，不受被测量机体的几何形状限制，可以在任意位置上保证良好的接触面和极小的接触电阻。
The invention discloses a microarray electrode for biological information sampling, which comprises a silicon chip body, on which an array electrode is arranged, the electrode is a conical needle, the diameter of the top of the needle is less than 10 microns, and the height of the needle is H 350-650 microns, the diameter L of the bottom surface of the conical needle is 50-80 microns, and the outer surface of the needle and the silicon wafer is covered with a metal layer; the metal layer located on the bottom of the silicon wafer is provided with a lead line; The distance M between the adjacent needles is 50-200 microns; the needles are provided with pinholes, and the lower ends of the pinholes are connected with the silicon wafer. The invention solves the problem of contact resistance between the electrode and the skin, does not need to smear conductive substances on the skin, is not limited by the geometry of the body to be measured, and can ensure a good contact surface and extremely small contact resistance at any position.
Description
Technical field
The invention belongs to medical apparatus and instruments, relate in particular to a kind of tiny array electrode that is used for the bio information sampling.
Background technology
Medical EEG electrode is a kind of pick off commonly used during medical science detects. must contact with people's body by suitable medical electrode when adopting electroencephalograph that human body is checked, purpose be to draw human biological electricity and by suitable processing and amplifying observe, record, measure bio electricity and change the purpose that reaches the diagnosis state of an illness. as seen, the quality of medical electrode directly has influence on the testing result of the heart and brain signal of telecommunication, and its importance can not be ignored.Electroencephalograph supporting medical electrode select for use new and oldly differ, diversified in specifications, combinations such as the contact degree of tightness differs, surface clean difference carry out eeg measurement to human body.The result causes that electroencephalograph measuring process record disturbs big, aliasing, metering is inaccurate, diagnostic result is unreliable.Therefore, the quality of medical electrode is very big to the influence of electroencephalograph measurement result.
Summary of the invention
The object of the present invention is to provide a kind of simple in structurely, easy to process, that measuring process record disturbs is little, figure is undistorted, the tiny array electrode of accurate measurement, the reliable bio information sampling of diagnostic result.
The present invention is achieved by the following technical solutions:
A kind of tiny array electrode that is used for the bio information sampling, comprise wafer bulk, wafer bulk is provided with array electrode, described electrode is conical syringe needle, the diameter of needle tip is less than 10 microns, the height H of syringe needle is 350～650 microns, and the bottom surface diameter L of conical syringe needle is 50～80 microns, is coated with metal layer at the outer surface of syringe needle and wafer bulk; The metal level that is positioned on the wafer bulk bottom surface is provided with lead-out wire.
Spacing M between the described needle adjacent is 50～200 microns.
Be provided with pin hole in the described syringe needle, the lower end of pin hole links to each other with wafer bulk.
Advantage of the present invention is:
1, solved the contact resistance problem of electrode and skin.
2, need on skin, not smear conductive materials.
3, not limited by the geometry of measured body, can go up at an arbitrary position and guarantee excellent contact face and minimum contact resistance.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 be among Fig. 1 A-A to cross sectional view.
The specific embodiment
Embodiment: the tiny array electrode that is used for the bio information sampling as shown in the figure, on wafer bulk 1, be provided with array electrode, described electrode is conical syringe needle 2, the diameter at syringe needle 2 tops is less than 10 microns, the height H of syringe needle 2 is 350～650 microns, the bottom surface diameter L of conical syringe needle 2 is 50～80 microns, is coated with metal layer 4 at the outer surface of syringe needle 2 and wafer bulk 1; The metal level 4 that is positioned on wafer bulk 1 bottom surface is provided with lead-out wire 5.Spacing M between the described needle adjacent 2 is 50～200 microns.Be provided with pin hole 3 in the described syringe needle 2, the lower end of pin hole 3 is connected with wafer bulk 1.
The height of described syringe needle 2, bottom surface diameter and neighbor distance can be decided in above-mentioned scope as the case may be, come to determine the quantity of syringe needle 2 in the unit are thus.
Add man-hour earlier on wafer bulk 1 in unit are, etch the tiny array electrode of forming by a plurality of syringe needles 2, the outside realizes that by surface evaporation smithcraft (hardness big as nickel, chromium etc.) forming heart is wafer bulk 1, outer structure of wrapping up layer of metal layer 4 within it again.The structure of parcel layer of metal layer 4 on wafer bulk 1, the hardness that had both guaranteed syringe needle 2 is also wanted the toughness and the electric conductivity of metal, guarantees to deposit in to prevent when syringe needle 2 thrusts keratodermatitis that syringe needle 2 from rupturing.Syringe needle 2 thrusts horny layer, does not reach the nerve ending degree of depth, therefore can not cause pain, and syringe needle 2 thrusts horny layer can constitute excellent contact face and minimum contact resistance, has solved the contact resistance problem of electrode and skin.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101726683A CN102068252A (en) | 2009-11-23 | 2009-11-23 | Microarray electrode for sampling biological information |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009101726683A CN102068252A (en) | 2009-11-23 | 2009-11-23 | Microarray electrode for sampling biological information |
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| CN102068252A true CN102068252A (en) | 2011-05-25 |
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| CN2009101726683A Pending CN102068252A (en) | 2009-11-23 | 2009-11-23 | Microarray electrode for sampling biological information |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102319068A (en) * | 2011-07-29 | 2012-01-18 | 上海交通大学 | Electroencephalo-graph dry electrode based on capacitive coupling principle |
| CN103172015A (en) * | 2011-12-23 | 2013-06-26 | 罗伯特·博世有限公司 | Method for producing silicon microneedle arrays with holes and microneedle array |
| CN103908240A (en) * | 2014-04-03 | 2014-07-09 | 汪成 | Electrode plate for monitoring of human body electric signals |
| CN112754487A (en) * | 2021-01-11 | 2021-05-07 | 休美(北京)微系统科技有限公司 | Mesh Dry Electrode |
| CN112754486A (en) * | 2021-01-11 | 2021-05-07 | 休美(北京)微系统科技有限公司 | Annular dry electrode |
-
2009
- 2009-11-23 CN CN2009101726683A patent/CN102068252A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102319068A (en) * | 2011-07-29 | 2012-01-18 | 上海交通大学 | Electroencephalo-graph dry electrode based on capacitive coupling principle |
| CN102319068B (en) * | 2011-07-29 | 2013-08-28 | 上海交通大学 | Electroencephalo-graph dry electrode based on capacitive coupling principle |
| CN103172015A (en) * | 2011-12-23 | 2013-06-26 | 罗伯特·博世有限公司 | Method for producing silicon microneedle arrays with holes and microneedle array |
| US9555229B2 (en) | 2011-12-23 | 2017-01-31 | Robert Bosch Gmbh | Method for producing silicon microneedle arrays with holes and microneedle array |
| CN103908240A (en) * | 2014-04-03 | 2014-07-09 | 汪成 | Electrode plate for monitoring of human body electric signals |
| CN103908240B (en) * | 2014-04-03 | 2016-08-17 | 深圳市太极医疗科技有限公司 | A kind of body electrical signals monitoring electrode slice |
| CN112754487A (en) * | 2021-01-11 | 2021-05-07 | 休美(北京)微系统科技有限公司 | Mesh Dry Electrode |
| CN112754486A (en) * | 2021-01-11 | 2021-05-07 | 休美(北京)微系统科技有限公司 | Annular dry electrode |
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Application publication date: 20110525 |