This Agda code shouldn't result in any lexing errors, A' and B' are valid module names:

module A' where

module B' = A'

But pygments interprets the ' as start of character:

https://pygments.org/demo/?lexer=agda&style=default&formatter=html&code=module+A%27+where%0A%0Amodule+B%27+%3D+A%27